The invention provides a simultaneous detection biological sensor by utilizing
capacitance and conduction of a quasi-one-dimensional nanometer material field effective tube based on the sensitivity property of the
capacitance and the conduction of the quasi-one-dimensional nanometer material field, belonging to the technical field of micro-
machine systems and biological nanometer sensing. The simultaneous
detector sensor mainly consists of an insulating layer, a
metal electrode, a quasi-one-dimensional nanometer material, a groove and a groove bottom biological modifying layer, a
metal gate and a
microfluidic channel, wherein the insulating layer is positioned on an upper
silicon slice; the
metal electrode, the quasi-one-dimensional nanometer material, the groove and the groove bottom biological modifying layer are positioned on the insulating layer; the
metal gate is positioned on a lower
silicon slice; and the
microfluidic channel is formed by the
metal gate and the groove. The quasi-one-dimensional nanometer material field effective tube is utilized and is biologically modified, and
antigen antibody reaction is utilized to affect a gate
electric field so as to change the conductance of the quasi-one-dimensional nanometer material channel and the
capacitance of the field effective tube so as to realize biological molecule or
virus detection technology with high sensitivity, rapidness and accuracy. Combining the MEMS technology with the back
silicon chip biological modification technology, the invention is simple to process, is suitable for large-
batch production, and is easy for integration and promotion application.