Simultaneous detection biological sensor by utilizing capacitance and conduction of quasi-one-dimensional nanometer material field effective tube

A biosensor and nanomaterial technology, which is applied in the field of quasi-one-dimensional nanomaterial field effect tube capacitance and conductance simultaneous detection of biosensors, can solve problems such as viscous damping and sensitivity decline, achieve high sensitivity, simple processing technology, and easy popularization and application. Effect

Inactive Publication Date: 2010-01-13
BEIJING INFORMATION SCI & TECH UNIV
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  • Application Information

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Problems solved by technology

In a vacuum environment, the sensitivity of the micromachined cantilever beam sensor is high, howev

Method used

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  • Simultaneous detection biological sensor by utilizing capacitance and conduction of quasi-one-dimensional nanometer material field effective tube
  • Simultaneous detection biological sensor by utilizing capacitance and conduction of quasi-one-dimensional nanometer material field effective tube
  • Simultaneous detection biological sensor by utilizing capacitance and conduction of quasi-one-dimensional nanometer material field effective tube

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Embodiment 1

[0019] like figure 1 Shown is a schematic diagram of a three-dimensional structure of a quasi-one-dimensional nanomaterial field effect tube for simultaneously detecting the upper surface of a silicon wafer on a biosensor, as shown in figure 2 Shown is a schematic diagram of a three-dimensional structure of a quasi-one-dimensional nanomaterial field effect tube for simultaneously detecting the lower surface of a silicon wafer on a biosensor, as shown in image 3 Shown is a schematic diagram of the three-dimensional structure of the silicon chip under the biosensor for simultaneous detection of the capacitance and conductance of the quasi-one-dimensional nanomaterial field effect tube.

[0020] like Figure 4 As shown, the quasi-one-dimensional nanomaterial field effect tube capacitance conductance simultaneous detection biosensor includes two parts, the lower silicon wafer 1 and the upper silicon wafer 2, which are mainly composed of an insulating layer 3, a metal electrode ...

Embodiment 2

[0040] like Figure 5 Shown is a schematic diagram of a three-dimensional structure of a quasi-one-dimensional nanomaterial field effect tube for simultaneously detecting the upper surface of a silicon wafer on a biosensor, as shown in figure 2 Shown is a schematic diagram of a three-dimensional structure of a quasi-one-dimensional nanomaterial field effect tube for simultaneously detecting the lower surface of a silicon wafer on a biosensor, as shown in image 3 Shown is a schematic diagram of the three-dimensional structure of the silicon chip under the biosensor for simultaneous detection of the capacitance and conductance of the quasi-one-dimensional nanomaterial field effect tube.

[0041] like Image 6 As shown, the quasi-one-dimensional nanomaterial field effect tube capacitance and conductance simultaneous detection biosensor includes two parts, a lower silicon wafer 1 and an upper silicon wafer 2, which are mainly composed of an insulating layer 3, a metal interdigi...

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Abstract

The invention provides a simultaneous detection biological sensor by utilizing capacitance and conduction of a quasi-one-dimensional nanometer material field effective tube based on the sensitivity property of the capacitance and the conduction of the quasi-one-dimensional nanometer material field, belonging to the technical field of micro-machine systems and biological nanometer sensing. The simultaneous detector sensor mainly consists of an insulating layer, a metal electrode, a quasi-one-dimensional nanometer material, a groove and a groove bottom biological modifying layer, a metal gate and a microfluidic channel, wherein the insulating layer is positioned on an upper silicon slice; the metal electrode, the quasi-one-dimensional nanometer material, the groove and the groove bottom biological modifying layer are positioned on the insulating layer; the metal gate is positioned on a lower silicon slice; and the microfluidic channel is formed by the metal gate and the groove. The quasi-one-dimensional nanometer material field effective tube is utilized and is biologically modified, and antigen antibody reaction is utilized to affect a gate electric field so as to change the conductance of the quasi-one-dimensional nanometer material channel and the capacitance of the field effective tube so as to realize biological molecule or virus detection technology with high sensitivity, rapidness and accuracy. Combining the MEMS technology with the back silicon chip biological modification technology, the invention is simple to process, is suitable for large-batch production, and is easy for integration and promotion application.

Description

technical field [0001] The invention belongs to the technical fields of micromechanical systems and bio-nano sensing, and in particular relates to a quasi-one-dimensional nanomaterial field effect tube capacitance conductance simultaneous detection biosensor based on the simultaneous sensitivity characteristic of quasi one-dimensional nanometer material field effect tube capacitance conductance. Background technique [0002] Due to the development of biology and medicine, the traditional biological detection technology is increasingly overwhelmed due to its low detection sensitivity, poor repeatability, relatively complicated detection process, long detection time, and huge detection equipment. In recent years, biosensors made by micro-mechanical system technology have been favored for their small size, low cost, high sensitivity, and short detection time. So far, biochemical information has been detected using flexible mechano-sensing structures, such as cantilever beams. ...

Claims

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Application Information

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IPC IPC(8): G01N33/569G01N27/414G01N27/04G01N27/22
Inventor 邹小平程进
Owner BEIJING INFORMATION SCI & TECH UNIV
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