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A gas circulation system for excimer laser

An excimer laser and gas circulation technology, applied in the field of ArF and KrF excimer lasers, can solve the problems of limited scope of application, inability to reduce costs, inability to remove impurities in working gas, etc.

Active Publication Date: 2018-05-01
RAINBOW SOURCE LASER RSLASER
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] What the present invention aims to solve is that the existing method for improving the working gas life of an excimer laser cannot reduce the cost, nor can it remove impurities in the working gas, or the scope of application is limited, or the defects that cause the decline of the output energy of the laser

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  • A gas circulation system for excimer laser
  • A gas circulation system for excimer laser

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Embodiment Construction

[0019] The invention obtains a gas circulation system, which improves the working life of excimer laser gas by supplementing halogen gas and removing impurities. The system of the present invention first prolongs the working time of the laser by intermittently replenishing the halogen gas. When the intermittently replenishing the halogen gas cannot effectively restore the output energy of the laser, it uses a part of the gas that has been worked for a long time to react with oxygen outside the cavity and then use a cold trap Remove impurities, and finally fill the purified gas back into the chamber for reuse. In this way, the output energy is recovered, the service life of the working gas is improved, and the cost is saved. The amount of oxygen charged is analyzed by a mass spectrometer to ensure that the impurities are fully reacted and at the same time there is no oxygen remaining, which not only effectively removes the impurities, but also does not cause a significant drop ...

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Abstract

The invention discloses a gas circulation system, which is used for circulating the working gas of an excimer laser. The cavity of the excimer laser has an inlet pipe and an outlet pipe. The gas circulation system includes a condenser (1), an oxygen supply device (2), The compressor (3) and the gas storage chamber (4), the gas storage chamber (4) are respectively connected with the outlet pipeline, the condenser (1), and the oxygen supply device (2) through valves. The oxygen supply device (2) is used to provide oxygen to the gas storage chamber (4); the gas storage chamber (4) is used to fully react the oxygen and the working gas from the cavity to generate a reaction gas; the condenser (1) conducts the reaction gas Refrigeration, thereby removing impurities to output non-condensed gas, the compressor (3) extracts the non-condensed gas in the condenser (4) and transports it to the cavity. The invention can effectively improve the service life of the working gas, and at the same time, the output energy will not decrease due to the addition of other gases during the impurity removal process.

Description

technical field [0001] The invention relates to a gas circulation system for an excimer laser. The system improves the gas working life of the excimer laser by supplementing halogen gas and removing impurities, and is especially suitable for ArF and KrF excimer lasers. Background technique [0002] Excimer lasers can output laser light in the ultraviolet band, and have a very narrow linewidth and high energy, so they are widely used as light sources in the lithography industry. Currently, the most widely used excimer lasers in the lithography industry are ArF and KrF excimer lasers. The working gas of the excimer laser is a rare gas halide such as ArF and KrF, which is passed through the halogen gas F 2 It reacts with the rare gases argon and krypton. Excimer lasers are different from other gas lasers. Excimer lasers need to replace the working gas more frequently. This is because excimer lasers face a common problem that the life of the working gas of excimer lasers decay...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01S3/036
Inventor 沙鹏飞单耀莹彭卓君宋兴亮蔡茜玮范元媛李慧赵江山周翊
Owner RAINBOW SOURCE LASER RSLASER
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