Optical sensor capable of improving aperture ratio and manufacturing method of optical sensor

Abstract

The invention provides an optical sensor capable of improving aperture ratio and a manufacturing method of the optical sensor. The method includes forming a first metal layer so as to define a grid electrode of a control assembly and a first lower electrode of a photosensitive assembly; forming an amorphous silicon layer; forming a first conductive layer above the first lower electrode; forming a second metal layer so as to define source and drain electrodes of the control assembly and a second lower electrode of the photosensitive assembly; forming a first insulation layer above the second metal layer; forming an SRO film layer above the second metal layer and opposite to the first conductive layer; and forming a second conductive layer above the SRO film layer. Compared with the prior art, the first conductive layer is additionally arranged under the second metal layer, one sensing capacitor lower electrode uses small-area Ti / AI / Ti layered composite materials to be cooperated with large-area transparent conductive materials to extend to increase the values of the whole sensing capacitor, so that the aperture ratio is increased without decreasing the sensing capacitance.

Description

technical field [0001] The invention relates to a sensing detection technology, in particular to an optical sensor capable of increasing the aperture ratio and a manufacturing method thereof. Background technique [0002] Fingerprint sensor (also known as fingerprint sensor) is a key device to realize automatic fingerprint collection. Generally speaking, fingerprint sensors can be divided into optical fingerprint sensors, semiconductor capacitive sensors, semiconductor thermal sensors, semiconductor pressure sensors, ultrasonic sensors and radio frequency RF sensors according to the principle of fingerprint imaging. [0003] The manufacture of fingerprint sensors is a high-tech with strong comprehensiveness, high technical complexity and difficult manufacturing process. Taking the optical fingerprint sensor as an example, it mainly uses the principle of refraction and reflection of light. The light is emitted from the backlight module to the LCD panel, and the light emitted...

AI Technical Summary

Problems solved by technology

However, in order to meet the demand for increasing resolution, the photosensitive element (such as SRO component) in the existing fingerprint sensor is often realized by reducing the area of ​​the upper and lower electrodes of the sensing capacitor, and the reduction of the sensing capacitor will inevitably affect the fingerprint detection. Accuracy has a certain degree of influence

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