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One-piece ceramic capacitance pressure transducer and manufacture method

A pressure sensor, ceramic capacitor technology, applied in the direction of fluid pressure measurement, instrument, measurement force, etc. using capacitance change, can solve the problems of product sealing and bonding strength.

Active Publication Date: 2015-11-04
襄阳臻芯传感科技有限公司
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  • Abstract
  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

The strength of this type of sealing material is much lower than that of the ceramic substrate, so it has a great influence on the sealing and bonding strength of the product

Method used

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  • One-piece ceramic capacitance pressure transducer and manufacture method
  • One-piece ceramic capacitance pressure transducer and manufacture method
  • One-piece ceramic capacitance pressure transducer and manufacture method

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Embodiment Construction

[0029] Such as image 3 As shown, the elastic thin substrate 1 is circular and has a thickness of 0.3-0.8 mm. The elastic thin substrate 1 is a tape-cast alumina or zirconia green ceramic sheet, on which a thin substrate metal electrode 7 and a thin substrate electrode pad 6 are fabricated by screen printing or vacuum sputtering, and its thickness is 0.5-1 μm . The edge of the elastic thin substrate 1 is provided with a thin substrate positioning notch 8 . The thin substrate metal electrode 7 is concentric with the circular elastic thin substrate 1 . When the pressure sensor is subjected to external pressure, the elastic thin substrate is elastically bent along the thickness direction of the plate.

[0030] Such as Figure 4 As shown, the thick substrate 3 is circular and has a thickness of 3-8 mm. On the thick substrate 3, the thick substrate metal electrode 10 and the ring metal electrode 11 surrounding the thick substrate metal electrode 10 are also made by screen prin...

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Abstract

The invention discloses a one-piece ceramic capacitance pressure transducer and a manufacture method, and belongs to pressure transducer technology field. The problem of poor reliability caused by poor sealing between thick sheets and thin sheets and low bonding intensity of existing ceramic capacitance pressure transducers is solved. The invention is characterized in that the one-piece ceramic capacitance pressure transducer comprises an elastic thin substrate, a thick substrate, and a gap spacing block between the thin and the thick substrate; the elastic thin substrate, the thick substrate and the gap spacing block are made by laminating alumina or zirconia raw tiles through tape casting; the elastic thin substrate, the gap spacing block and the thick substrate are made as a whole after sintering. The one-piece ceramic capacitance pressure transducer has the advantages of ensuring intensity and sealing between the ceramic substrates, and raising product reliability, and can be mainly used for ceramic capacitance pressure transducers.

Description

technical field [0001] The invention belongs to the technical field of pressure sensors, and in particular relates to an integrated ceramic capacitive pressure sensor and a manufacturing method thereof. Background technique [0002] At present, ceramic capacitive pressure sensors are equipped with electrodes on the opposite sides of two thick and thin ceramic substrates, and ceramic balls, resin balls or low-temperature co-fired (LTCC) ceramic green sheets are used as spacers to control the distance between electrodes. Forms a capacitor of the specified initial capacitance value. When the ceramic substrate is subjected to external pressure, the thin substrate will be deformed, resulting in a change in capacitance value, and the external pressure on the substrate can be detected based on this capacitance change value. The two ceramic substrates of this ceramic capacitive pressure sensor are sintered and bonded together by sealing materials (such as glass), and the two cerami...

Claims

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Application Information

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IPC IPC(8): G01L1/14G01L9/12
Inventor 赵兴奎周宇波
Owner 襄阳臻芯传感科技有限公司
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