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Acoustic resonator device with air-ring and temperature compensating layer

A technology of temperature compensation and resonator, applied in the direction of electrical components, output stability, impedance network, etc., can solve problems such as limiting effectiveness

Active Publication Date: 2015-11-11
AVAGO TECH INT SALES PTE LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

A temperature compensation layer can be placed below or above the piezoelectric layer, which limits the effectiveness of the additional top frame for suppressing eigenmodes localized to the bottom of the resonator stack

Method used

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  • Acoustic resonator device with air-ring and temperature compensating layer
  • Acoustic resonator device with air-ring and temperature compensating layer
  • Acoustic resonator device with air-ring and temperature compensating layer

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Embodiment Construction

[0024] In the following detailed description, for purposes of explanation and not limitation, example embodiments disclosing specific details are set forth in order to provide a thorough understanding of the teachings of the present invention. However, those of ordinary skill in the art having the benefit of this disclosure will appreciate that other embodiments of the teachings of the present invention that depart from the specific details disclosed herein remain within the scope of the appended claims. Moreover, descriptions of well-known devices and methods may be omitted so as not to obscure the description of the example embodiments. Such methods and apparatus are clearly within the scope of the teachings of the present invention.

[0025] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting. The defined terms are in addition to their commonly understood and accepted technical, scientific or ordinary ...

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Abstract

A bulk acoustic wave (BAW) resonator device includes a substrate defining a cavity, a bottom electrode formed over the substrate and at least a portion of the cavity, a piezoelectric layer formed on the bottom electrode, and a top electrode formed on the piezoelectric layer. An air-wing and an air-bridge are formed between the piezoelectric layer and the top electrode, the air-wing having an inner edge that defines an outer boundary of an active region of the BAW resonator device. The BAW resonator device further includes a temperature compensation feature having positive temperature coefficient for offsetting at least a portion of a negative temperature coefficient of the piezoelectric layer. The temperature compensation feature extends outside the active region by a predetermined length.

Description

technical field [0001] The present application relates to an acoustic resonator arrangement with an air ring and a temperature compensation layer. Background technique [0002] Acoustic resonators can be used to implement signal processing functions in a variety of electronic applications. For example, some cellular telephones and other communication devices use acoustic resonators to implement frequency filters for transmitted and / or received signals. Several different types of acoustic resonators are used depending on the application, examples include Bulk Acoustic Wave (BAW) resonators such as Film Bulk Acoustic Resonators (FBAR), Coupled Resonator Filters (CRF), Stacked Bulk Acoustic Resonator (SBAR), Double Bulk Acoustic Resonator (DBAR) and Solid State Mounted Resonator (SMR). For example, a FBAR includes a piezoelectric layer between a bottom (first) electrode and a top (second) electrode above a cavity. BAW resonators can be used in a wide variety of electronic ap...

Claims

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Application Information

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IPC IPC(8): H03H9/17H03H9/02H03L1/02
CPCH03H3/013H03H9/02102H03H9/132H03H9/173H03H9/02086
Inventor 邹强克里斯·冯菲尔·尼克尔约翰·乔伊亚历山大·奥古斯图·施拉卡瓦蒂娜·L·拉梅尔斯张肃井达里乌斯·布拉卡
Owner AVAGO TECH INT SALES PTE LTD
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