Double optical path detection lateral shearing interferometer and interference method thereof

Abstract

The invention provides a double optical path detection lateral shearing interferometer, which comprises a beam-splitting cubic prism 1, a beam-splitting cubic prism 2, a right-angle reflecting prism 1 and a right-angle reflecting prism 2, wherein an incident optical axis is vertical to an incident surface of the beam-splitting cubic prism 1 and is positioned at the center of the incident surface of the beam-splitting cubic prism 1; beam-splitting surfaces of the beam-splitting cubic prism 1 and the beam-splitting cubic prism 2 are positioned on the same plane, and the beam-splitting cubic prism 2 is positioned between an emergent surface of transmitted light rays of the beam-splitting cubic prism 1 and a hypotenuse surface of the right-angle reflecting prism 1; the hypotenuse surface of the right-angle reflecting prism 1 is parallel to the incident surface of the beam-splitting cubic prism 1; the right-angle reflecting prism 2 is positioned on the upper side of the beam-splitting cubic prism 2, and a hypotenuse surface of the right-angle reflecting prism 2 is parallel to the emergent surface of reflected light rays of the beam-splitting cubic prism 1. The invention further provides a lateral shearing interference method, which has higher interference efficiency, improves performance of the interferometer, and reduces the strict requirement of the interferometer on performance of a beam splitting film.

Description

technical field [0001] The invention relates to a transverse shearing interferometer, in particular to a double optical path detection transverse shearing interferometer and an interference method thereof. Background technique [0002] The traditional transverse shearing interferometry technology uses a Sagnac interferometer, which is composed of two half-pentagonal prisms, and the relative positions of the two half-pentagonal prisms are adjusted to obtain different shearing quantities, such as figure 1 shown. After splitting, half of the light energy returns along the original path of the incident light path, and half of the light energy exits to the subsequent optical system for detection by interference imaging spectroscopy instruments. Since half of the light energy returns along the incident light path, the energy cannot be fully utilized, which reduces the interference efficiency, and the interferometer has high requirements on the performance of the spectroscopic fil...

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Problems solved by technology

Since half of the light energy returns along the incident light path, the energy cannot be fully utilized, which reduce

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