Sharpening and positioning device for cutting blade and installation method thereof
A technology of positioning device and cutting blade, applied in the direction of positioning device, grinding workpiece support, other manufacturing equipment/tools, etc., can solve the problems of deviation, the inability of the sharpening plate to accurately locate the installation position, etc., so as to prolong the service life and stabilize the product. Yield, avoid the effect of inaccurate positioning
Active Publication Date: 2017-12-08
WUHAN XINXIN SEMICON MFG CO LTD
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Problems solved by technology
[0006] The purpose of the present invention is to provide a sharpening positioning device for cutting blades and its installation method, so as to solve the problem that the existing sharpening plate cannot be accurately positioned during installation and cause the installation position deviation, and improve the sharpening effect of the blade
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[0026] The sharpening positioning device of the cutting blade of the present invention and its installation method will be described in more detail below in conjunction with schematic diagrams, wherein a preferred embodiment of the present invention is represented, it should be understood that those skilled in the art can modify the present invention described here, and The advantageous effects of the invention are still achieved. Therefore, the following description should be understood as the broad knowledge of those skilled in the art, but not as a limitation of the present invention.
[0027] In the interest of clarity, not all features of an actual implementation are described. In the following description, well-known functions and constructions are not described in detail since they would obscure the invention with unnecessary detail. It should be appreciated that in the development of any actual embodiment, numerous implementation details must be worked out to achieve ...
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The invention proposes a knife sharpening positioning device for a cutting blade and an installation method thereof. Multiple positioning claws are used to close and clamp the sharpening plate to position the sharpening plate, and the sharpening plate is accurately installed on the adsorption plate, avoiding inaccurate positioning in the prior art. Accurate, so as to prolong the service life of the sharpening plate, and ensure a good fit between the sharpening plate and the adsorption plate, to ensure stable vacuum adsorption, so that there is no relative sliding of the knife when sharpening the knife on the sharpening plate, so as to ensure the sharpening of the knife effect, thereby improving and stabilizing the product yield.
Description
technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a sharpening and positioning device for cutting blades and an installation method thereof. Background technique [0002] In the production process of semiconductors, it is necessary to use a cutting machine (Trimming) to cut the wafer edge (wafer edge) through a tool to meet the required process requirements, and the tool will inevitably wear during the cutting process, so the tool It is necessary to periodically dress the knife on the dress board. A dressboard is usually mounted on a dressboard unit and vacuumed onto a chuck table. [0003] Please refer to figure 1 , the existing sharpening board device includes a sharpening board 10, an adhesive surface 11 and a substrate 12, which are usually adsorbed on the suction disc 13 by vacuum. However, the sharpening plate 10 is a wearing part and needs to be replaced periodically. [0004] However, the currently used sha...
Claims
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IPC IPC(8): B23Q3/06B24B3/36B24B41/06
CPCB24B3/36B24B41/06
Inventor 曹舟黄涛
Owner WUHAN XINXIN SEMICON MFG CO LTD