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Precise machine stand vibration attenuation base capable of measuring amplitude

A precision machine and amplitude technology, applied in the direction of engine base, supporting machine, mechanical equipment, etc., can solve the problem of photolithographic pattern misalignment, etc., and achieve the effect of reducing vibration, reasonable design and simple structure

Inactive Publication Date: 2015-11-25
HEFEI CHIP FOUND MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

PCB lithography equipment has high requirements on precision, and the vibration around the environment has a great impact on its lithography accuracy, and in severe cases, it will cause dislocation of lithography patterns

Method used

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  • Precise machine stand vibration attenuation base capable of measuring amplitude
  • Precise machine stand vibration attenuation base capable of measuring amplitude
  • Precise machine stand vibration attenuation base capable of measuring amplitude

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Experimental program
Comparison scheme
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Embodiment Construction

[0013] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0014] Such as Figure 1 ~ Figure 4 As shown, a vibration-absorbing seat of a precision machine that can measure amplitude includes an upper damping block 1 , a lower damping block 2 and several rollers 3 . The lower surface of the upper damping block 1 is an outer convex arc surface, and the upper surface of the lower vibration damping block 2 is an inner concave arc surface. The overall structure formed by block 2 is in the shape of a cuboid. The upper surface of the upper damping block 1 is provided with a number of bolt mounting holes, which are used to be fixedly connected with the precision machine 0 by bolts. Several rollers 3 are tightly pressed between the lower surface of the upper damping block 1 and the upper surface of the lower damping block 2 . When the precision machine 0 is vibrated, the upper damping block 1 drives the prec...

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Abstract

The invention provides a precise machine stand vibration attenuation base capable of measuring the amplitude. The precise machine stand vibration attenuation base comprises an upper vibration attenuation block, a lower vibration attenuation block and a plurality of pin rollers; the upper vibration attenuation block is fixedly connected with a precise machine stand, and the multiple pin rollers are arranged between the lower surface of the upper vibration attenuation block and the upper surface of the lower vibration attenuation block in a tightly-pressed manner; the lower surface of the upper vibration attenuation block is an outwards-convex arc face, and the upper surface of the lower vibration attenuation block is an inwards-concave arc face matched with the outwards-convex arc face; and an amplitude scale strip is arranged on one lateral face of the lower vibration attenuation block, and a marking strip used for pointing to the amplitude scale strip is arranged on the corresponding lateral face of the upper vibration attenuation block. According to the precise machine stand vibration attenuation base, as the structures of pointer scales and the pin rollers are ingeniously combined, the influences of vibration on the precise machine stand can be reduced, meanwhile, the amplitude can be measured, and data supports are further provided for vibration attenuation. The precise machine stand vibration attenuation base is simple in structure and reasonable in design.

Description

technical field [0001] The invention relates to the technical field of semiconductor photolithography machines, in particular to a precision machine vibration damping seat capable of measuring amplitude. Background technique [0002] The precision machine is an important part of PCB lithography equipment. During the working process, its upper part is connected to the exposure device, and its lower part is connected to the ground or the bottom frame through the mounting seat. PCB lithography equipment has high requirements on precision, and the vibration around the environment has a great impact on its lithography accuracy, and in severe cases, it will cause dislocation of lithography patterns. Due to the variety of environmental vibration sources and the complicated vibration transmission process, if the vibration of the precision machine can be measured in time and the precision machine is installed in a relatively stable place, the stability of the PCB lithography equipm...

Claims

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Application Information

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IPC IPC(8): F16M5/00F16F15/02
Inventor 曹常瑜
Owner HEFEI CHIP FOUND MICROELECTRONICS EQUIP CO LTD
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