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Contrast anti-interference laser interferometer with a microtremor ladder-type optical corner reflector and calibration method and measuring method thereof

A technology of laser interferometer and corner reflector, which is applied in the direction of measuring devices, instruments, and optical devices, and can solve the problems of poor anti-interference ability of the environment

Active Publication Date: 2015-11-25
扬州荣成机械有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to provide a laser interferometer capable of resisting environmental interference in view of the shortcomings of current laser interferometers that are poor in anti-environmental interference

Method used

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  • Contrast anti-interference laser interferometer with a microtremor ladder-type optical corner reflector and calibration method and measuring method thereof
  • Contrast anti-interference laser interferometer with a microtremor ladder-type optical corner reflector and calibration method and measuring method thereof

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Effect test

Embodiment 1

[0045] Embodiment 1, as shown in the figure, a contrastive anti-interference laser interferometer with micro-movement step-angle mirrors, including a laser source 1, a micro-movement step-angle mirror 2, an interferometric photodetector group 4, a moving angle Reflector 3, beam splitter group 5 and micro-motion platform 10, the micro-movement stepped corner reflector 2 is arranged on the micro-motion platform 10, and the laser source 1 emits z-beam laser to the beam splitter group 5 beam, wherein z is a positive integer greater than or equal to 2, the interferometric photodetector group 4 includes z interferometric photodetectors, each interferometric photodetector 41 corresponds to a laser beam, each laser The beam is divided into a first laser beam group 7 and a second laser beam group 8 after passing through the beam splitter group 5. After being reflected by the moving stepped corner reflector 2, it shoots to the beam splitter group 5 again, and then shoots to the interfer...

Embodiment 2

[0050] Embodiment 2, as shown in the figure, a calibration method for a laser interferometer with a contrastive anti-interference micro-movement step angle mirror, including the following steps:

[0051] Step 1. Position adjustment: adjust the laser source 1, the micro-movement stepped corner reflector 2, the beam splitter group 5, the interferometric photodetector group 4, the reflection measurement photodetector group 6, the moving corner reflector 3 and the micro-movement the location of platform 10;

[0052] Step 2, adjust the optical path: start the laser source 1, and further precisely adjust the micro-movement stepped corner reflector 2, the beam splitter group 5, the interferometric photodetector group 4, the reflection measurement photodetector group 6, and the moving corner reflector 3 and the position of the micro-movement platform 10, so that the optical path of the laser interferometer meets the design requirements;

[0053] Step 3, generate the strongest interfe...

Embodiment 3

[0061] Embodiment 3, as shown in the figure, a measurement method using a comparative anti-interference micro-movement stepped angle mirror laser interferometer and a calibration method:

[0062] In the actual measurement environment, it is assumed that the signal reading measured by the calibration reflectance measurement photodetector 61a is x, the signal reading obtained by the calibration interferometric photodetector 41a is y, and the x value and the y value are at the strongest Comparisons are made in the interference database, the weakest interference database, and the 1 / n wavelength interference database. When the x value and y value match a certain set of values ​​in the strongest interference database, this position is considered to be the strongest constructive interference position , when the x value and y value match a set of values ​​in the weakest interference database, this position is considered as the weakest destructive interference position, when the x value...

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Abstract

The invention relates to the field of precision test technology and instruments, and in particular relates to a contrast anti-interference laser interferometer with a microtremor ladder-type optical corner reflector and a calibration method and a measuring method thereof. The contrast anti-interference laser interferometer with a microtremor ladder-type optical corner reflector includes a laser source, a sensitive ladder-type optical corner reflector, an interference measurement photoelectric detector group, a mobile optical corner reflector, a beam splitter group and a microtremor platform. The microtremor ladder-type optical corner reflector is arranged on the microtremor platform. The laser source radiates Z beams of laser beams to the beam splitter group and also includes a reflection measurement photoelectric detector group. A second laser beam group, after being radiated by the mobile optical corner reflector to the beam splitter group, forms a reflection laser beam group. Each laser beam of the reflection laser beam group radiates to the reflection measurement photoelectric detector group. The laser interferometer of the invention, determines the interference status of the laser interference beams in accordance to the intensity of the reflection laser beam group, and thus prevents interference.

Description

technical field [0001] The invention relates to the field of precision testing technology and instruments, in particular to a contrasting anti-interference micro-movement step-angle mirror laser interferometer, a calibration method and a measurement method. Background technique [0002] The emergence of lasers has enabled the rapid development of ancient interferometric technology. Lasers have the characteristics of high brightness, good directionality, monochromaticity and good coherence. Laser interferometry technology has been relatively mature. Laser interferometry system is widely used: measurement of precision length and angle, such as detection of linear scale, grating, gauge block, and precision screw; positioning detection system in precision instruments, such as control and correction of precision machinery; special purpose for large-scale integrated circuits Positioning detection systems in equipment and testing instruments; measurement of tiny dimensions, etc. A...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02
Inventor 康学亮张白毛建东
Owner 扬州荣成机械有限公司
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