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Magnetic micro displacement platform-type cascade step angle reflector laser interferometer, calibration method and measurement method

A corner mirror and interferometric measurement technology, applied in measurement devices, instruments, optical devices, etc., can solve problems such as poor anti-environmental interference ability, and achieve the effect of improving accuracy and improving movement accuracy.

Active Publication Date: 2015-10-07
上海吉江数据技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to provide a laser interferometer capable of resisting environmental interference in view of the shortcomings of current laser interferometers that are poor in anti-environmental interference

Method used

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  • Magnetic micro displacement platform-type cascade step angle reflector laser interferometer, calibration method and measurement method
  • Magnetic micro displacement platform-type cascade step angle reflector laser interferometer, calibration method and measurement method
  • Magnetic micro displacement platform-type cascade step angle reflector laser interferometer, calibration method and measurement method

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0055] Embodiment 1, as shown in the figure, a magnetic micro-displacement platform type cascaded step-angle reflector laser interferometer, including a laser source 1, a micro-moving step-angle reflector group 2, an interferometric photodetector group 4, a moving Angle reflector 3, beam splitter group 5 and magnetic micro-displacement platform 10, described micro-movement step-angle reflector group 2 includes two micro-movement step-angle reflectors 21 and a fixed angle reflector 22, two micro-movement step-angle reflectors The moving step angle reflector 21 is arranged on the magnetic micro-displacement platform 10;

[0056] The laser source 1 emits z laser beams to the beam splitter group 5, wherein z is a positive integer greater than or equal to 2, and the interferometric photodetector group 4 includes z interferometric photodetectors, each The interferometric photodetector 41 corresponds to a laser beam;

[0057] Each laser beam is divided into a first laser beam group ...

Embodiment 2

[0069] Embodiment 2, as shown in the figure, a calibration method for a magnetic micro-displacement platform-type cascaded step-angle mirror laser interferometer includes the following steps:

[0070] Step 1. Position adjustment: adjust the laser source 1, the micro-movement step angle mirror group 2, the beam splitter group 5, the interferometric photodetector group 4, the reflection measurement photodetector group 6, the moving corner mirror 3 and the magnetic micro The position of displacement platform 10;

[0071] Step 2. Adjusting the optical path: start the laser source 1, and further precisely adjust the micro-movement stepped angle mirror group 2, the beam splitter mirror group 5, the interferometric photodetector group 4, the reflection measurement photodetector group 6, and the moving angle mirror 3 and the position of the magnetic micro-displacement platform 10, so that the optical path of the laser interferometer meets the design requirements;

[0072] Step 3, gen...

Embodiment 3

[0080] Embodiment 3, as shown in the figure, a measurement method using a magnetic micro-displacement platform-type cascaded step-angle mirror laser interferometer and a calibration method:

[0081] In the actual measurement environment, it is assumed that the signal reading measured by the calibration reflectance measurement photodetector 61a is x, the signal reading obtained by the calibration interferometric photodetector 41a is y, and the x value and the y value are at the strongest Comparisons are made in the interference database, the weakest interference database, and the 1 / n wavelength interference database. When the x value and y value match a set of values ​​in the strongest interference database, this position is considered to be the strongest constructive interference position , when the x value and y value match a set of values ​​in the weakest interference database, this position is considered as the weakest destructive interference position, when the x value and ...

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Abstract

The invention relates to a precision testing technology and an apparatus field, and particularly relates to a magnetic micro displacement platform-type cascade step angle reflector laser interferometer, a calibration method and a measurement method. The magnetic micro displacement platform-type cascade step angle reflector laser interferometer comprises a laser source, an inching step angle reflection mirror set, an interference measurement photoelectric set, a mobile angle reflection mirror, a spectroscope set and a reflection measurement photoelectric detector set. The reflection measurement photoelectric detector set comprises z reflection measurement photoelectric detectors; a second laser beam set forms the reflection laser beam set after second laser beam set is projected by the mobile angle reflection mirror to the spectroscope set; and all laser beams of the reflection laser beam set are projected to a reflection measurement photoelectric detector. The laser interference device disclosed by the invention determines the interference state of the laser interference light beam and thus realizes the purpose of resisting environmental interference.

Description

technical field [0001] The invention relates to the field of precision testing technology and instruments, in particular to a magnetic micro-displacement platform-type cascaded step angle reflector laser interferometer, a calibration method and a measurement method. Background technique [0002] The emergence of lasers has enabled the rapid development of ancient interferometric technology. Lasers have the characteristics of high brightness, good directionality, monochromaticity and good coherence. Laser interferometry technology has been relatively mature. Laser interferometry system is widely used: measurement of precision length and angle, such as detection of linear scale, grating, gauge block, and precision screw; positioning detection system in precision instruments, such as control and correction of precision machinery; special purpose for large-scale integrated circuits Positioning detection systems in equipment and testing instruments; measurement of tiny dimensions...

Claims

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Application Information

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IPC IPC(8): G01B9/02
Inventor 许诚昕张白凌味未马文英
Owner 上海吉江数据技术有限公司
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