Contrast-type anti-interference stepped corner reflector laser interferometer, calibration method and measurement method

A technology of laser interferometer and corner reflector, which is applied in the direction of measuring devices, instruments, and optical devices, etc., and can solve the problems of poor anti-interference ability of the environment

Active Publication Date: 2015-12-23
扬州通锴建筑材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to provide a laser interferometer capable of resisting environmental interference in view of the shortcomings of current laser interferometers that are poor in anti-environmental interference

Method used

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  • Contrast-type anti-interference stepped corner reflector laser interferometer, calibration method and measurement method
  • Contrast-type anti-interference stepped corner reflector laser interferometer, calibration method and measurement method

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Experimental program
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Effect test

Embodiment 1

[0045] Embodiment 1, as shown in the figure, a contrasting anti-interference stepped corner reflector laser interferometer includes a laser source 1, a stepped corner reflector 2, an interferometric photodetector group 4, and a moving corner reflector 3 And the beam splitter group 5, the laser source 1 emits z beams of laser beams to the beam splitter group 5, wherein z is a positive integer greater than or equal to 2, and the interferometric photodetector group 4 includes z interferometric Photodetectors, each interferometric photodetector 41 corresponds to a laser beam, and each laser beam is divided into a first laser beam group 7 and a second laser beam group 8 after the beam splitter group 5, and the first laser beam group A laser beam group 7 shoots towards the stepped corner reflector 2, and after being reflected by the stepped corner reflector 2, shoots to the beam splitter group 5 again, and then shoots to the beam splitter group 5 after passing through the beam splitt...

Embodiment 2

[0050] Embodiment 2, as shown in the figure, a calibration method for a contrastive anti-interference stepped corner reflector laser interferometer, comprising the following steps:

[0051] Step 1. Position adjustment: adjust the positions of the laser source 1, the stepped corner reflector 2, the beam splitter group 5, the interferometric photodetector group 4, the reflection measurement photodetector group 6 and the moving corner reflector 3;

[0052] Step 2, adjust the optical path: start the laser source 1, further accurately adjust the steps of the stepped corner reflector 2, the beam splitter group 5, the interferometric photodetector group 4, the reflection measurement photodetector group 6 and the moving corner reflector 3 Position, so that the optical path of the laser interferometer meets the design requirements;

[0053] Step 3, generate the strongest interference database: select an interferometric photodetector 41 in the interferometric photodetector group 4 as th...

Embodiment 3

[0061] Embodiment 3, as shown in the figure, a measurement method using a comparative anti-interference stepped corner reflector laser interferometer and a calibration method:

[0062] In the actual measurement environment, it is assumed that the signal reading measured by the calibration reflectance measurement photodetector 61a is x, the signal reading obtained by the calibration interferometric photodetector 41a is y, and the x value and the y value are at the strongest Comparisons are made in the interference database, the weakest interference database, and the 1 / n wavelength interference database. When the x value and y value match a certain set of values ​​in the strongest interference database, this position is considered to be the strongest constructive interference position , when the x value and y value match a set of values ​​in the weakest interference database, this position is considered as the weakest destructive interference position, when the x value and y valu...

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Abstract

The invention relates to the field of precision test technologies and instruments, and particularly relates to a contrast-type anti-interference stepped corner reflector laser interferometer, a calibration method and a measurement method. The contrast-type anti-interference stepped corner reflector laser interferometer comprises a laser source, a stepped corner reflector, an interference measurement photoelectric detector group, a movable corner reflector and a beam splitter group, wherein the laser source shoots z laser beams to the beam splitter group. The contrast-type anti-interference stepped corner reflector laser interferometer further comprises a reflection measurement photoelectric detector group, wherein the reflection measurement photoelectric detector group comprises z reflection measurement photoelectric detectors. A second laser beam group further forms a reflection laser beam group after shooting to the beam splitter group from the movable corner reflector, and each laser beam of the reflection laser beam group respectively shoots to one reflection measurement photoelectric detector. The laser interferometer provided by the invention determines the interference state of a laser interference beam according to the intensity of the reflection laser beam group, thereby achieving a purpose of resisting environmental interference.

Description

technical field [0001] The invention relates to the field of precision testing technology and instruments, in particular to a contrasting anti-interference stepped corner reflector laser interferometer, a calibration method and a measurement method. Background technique [0002] The emergence of lasers has enabled the rapid development of ancient interferometric technology. Lasers have the characteristics of high brightness, good directionality, monochromaticity and good coherence. Laser interferometry technology has been relatively mature. Laser interferometry system is widely used: measurement of precision length and angle, such as detection of linear scale, grating, gauge block, and precision screw; positioning detection system in precision instruments, such as control and correction of precision machinery; special purpose for large-scale integrated circuits Positioning detection systems in equipment and testing instruments; measurement of tiny dimensions, etc. At presen...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02
Inventor 潘俊涛张白康学亮
Owner 扬州通锴建筑材料有限公司
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