Contrast anti-interference micro-motion step planar reflector laser interferometer and calibration method and measurement method

A technology of plane mirror and laser interferometer, which can be used in measurement devices, instruments, optical devices, etc., and can solve problems such as poor anti-environmental interference ability.

Active Publication Date: 2015-12-09
北信(扬州)管道技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to provide a laser interferometer capable of resisting environmental interference in view of the shortcomings of current laser interferometers that are poor in anti-environmental interference

Method used

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  • Contrast anti-interference micro-motion step planar reflector laser interferometer and calibration method and measurement method
  • Contrast anti-interference micro-motion step planar reflector laser interferometer and calibration method and measurement method

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Experimental program
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Effect test

Embodiment 1

[0045] Embodiment 1, as shown in the figure, a comparative anti-interference laser interferometer with micro-movement stepped mirror, including a laser source 1, a micro-moved stepped mirror 2, an interferometric photodetector group 4, and a moving plane reflector Mirror 3, beam splitter group 5 and micro-motion platform 10, the micro-movement step plane reflector is arranged on the micro-motion platform 10, the laser source 1 emits a z beam of laser beams to the beam splitter group 5, wherein z is a positive integer greater than or equal to 2, the interferometric photodetector group 4 includes z interferometric photodetectors, each interferometric photodetector 41 corresponds to a laser beam, and the micro-movement steps The reflective surface of the plane mirror 2 includes z reflective planes 21, and the z reflective planes 21 are arranged in a stepped manner. Each reflective plane 21 corresponds to a laser beam, and each laser beam passes through the beam splitter group 5 A...

Embodiment 2

[0050] Embodiment 2: As shown in the figure, a calibration method for a contrastive anti-interference micro-moving step mirror laser interferometer includes the following steps:

[0051] Step 1. Position adjustment: adjust the laser source 1, the micro-movement stepped mirror 2, the beam splitter group 5, the interferometric photodetector group 4, the reflectance measurement photodetector group 6, the moving plane mirror 3 and the micro-motion platform 10 position;

[0052] Step 2. Adjusting the optical path: start the laser source 1, and further precisely adjust the fine-motion step plane reflector 2, the beam splitter group 5, the interferometric photodetector group 4, the reflection measurement photodetector group 6, and the moving plane reflector 3 and the position of the micro-movement platform 10, so that the optical path of the laser interferometer meets the design requirements;

[0053]Step 3, generate the strongest interference database: select an interferometric pho...

Embodiment 3

[0061] Implementation 3: As shown in the figure, a measurement method using a comparative anti-interference micro-moving step mirror laser interferometer and a calibration method:

[0062] In the actual measurement environment, it is assumed that the signal reading measured by the calibration reflectance measurement photodetector 61a is x, the signal reading obtained by the calibration interferometric photodetector 41a is y, and the x value and the y value are at the strongest Comparisons are made in the interference database, the weakest interference database, and the 1 / n wavelength interference database. When the x value and y value match a certain set of values ​​in the strongest interference database, this position is considered to be the strongest constructive interference position , when the x value and y value match a set of values ​​in the weakest interference database, this position is considered as the weakest destructive interference position, when the x value and y ...

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Abstract

The invention relates to the field of precision test technologies and instruments, and particularly relates to a contrast anti-interference micro-motion step planar reflector laser interferometer and a calibration method and a measurement method. The contrast anti-interference micro-motion step planar reflector laser interferometer comprises a laser source, a micro-motion step planar reflector, an interference measurement photoelectric detector group, a mobile planar reflector, a beam splitter mirror group, and a micro-motion platform. The laser source emits z laser beams to the beam splitter mirror group. The contrast anti-interference micro-motion step planar reflector laser interferometer further comprises a reflection measurement photoelectric detector group. After a second laser beam group passes from the mobile planar reflector to the beam splitter mirror group, a reflected laser beam group is formed. Each laser beam in the reflected laser beam group shines onto one reflection measurement photoelectric detector. According to the laser interferometer of the invention, the interference state of laser interference beams is determined according to the intensity of a reflected laser beam group, and thus, the purpose of anti-environmental interference is achieved.

Description

technical field [0001] The invention relates to the field of precision testing technology and instruments, in particular to a contrasting anti-interference micro-movement step mirror laser interferometer, a calibration method and a measurement method. Background technique [0002] The emergence of lasers has enabled the rapid development of ancient interferometric technology. Lasers have the characteristics of high brightness, good directionality, monochromaticity and good coherence. Laser interferometry technology has been relatively mature. Laser interferometry system is widely used: measurement of precision length and angle, such as detection of linear scale, grating, gauge block, and precision screw; positioning detection system in precision instruments, such as control and correction of precision machinery; special purpose for large-scale integrated circuits Positioning detection systems in equipment and testing instruments; measurement of tiny dimensions, etc. At pres...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02
Inventor 张白
Owner 北信(扬州)管道技术有限公司
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