Flow Sensors and Equipment
A sensor and equipment technology, used in medical applications and gas flow sensors, can solve the problems of expensive and unacceptable gas flow sensors
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[0014] see first figure 1 , shows a flow sensor 1 positioned in the airflow 2 and providing an output to a device of use 3 such as a display or control unit. Airflow 2 may be within respiratory airflow tube 120 . The flow sensor 1 comprises a rigid but flexible elongate planar substrate 10 such as polycarbonate, and a piezoelectric member in the form of a membrane element 11 bonded or otherwise attached to the upper surface of the substrate. The piezoelectric membrane 11 is rectangular and slightly smaller than the substrate 10, and the membrane is relatively thin so that it is more flexible than the substrate. The membrane 11 has two terminals 12 and 13 at one edge 14 through which electrical signals are supplied to and from the piezoelectric element. The base 10 is mounted at one end 15 with a support in the form of a processing unit 20 so that the length of the base extends away from the processing unit and its opposite end 16 is free and unsupported. The free end 16 has...
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