Angular acceleration measuring device based on MEMS linear accelerometer

Abstract

The invention provides an angular acceleration measuring device based on an MEMS linear accelerometer. The angular acceleration measuring device comprises two MEMS linear acceleration chips and a sensor disc. The center of circle of the sensor disc is fixedly connected with a rotation shaft. The MEMS linear acceleration chips are respectively installed on the edge and the center of circle of the sensor disc. The linear acceleration sensing directions of the MEMS linear acceleration chips are mutually parallel and perpendicular to the radius direction of the sensor disc. When the sensor disc rotates along with the rotation disc, by subtracting the linear acceleration signals output by the MEMS linear acceleration chips, the circumferential rotation linear acceleration of the sensor disc can be obtained, and by dividing the circumferential rotation linear acceleration by the radius of the sensor disc, the final rotation angular acceleration can be obtained. According to the invention, an angular acceleration sensor is allowed to be simple in structure and highly reliable; and while the angular acceleration sensor has quite high precision, cost of the angular acceleration sensor is greatly reduced.

Description

technical field [0001] The invention relates to an angular acceleration measuring device, in particular to a device for indirectly measuring angular acceleration based on a MESM linear accelerometer. Background technique [0002] Among inertial sensors, angular acceleration sensors are used in a wide range of applications, such as vehicle smooth driving detection, missile inertial navigation systems, hard disk drives to eliminate jitter, digital cameras to eliminate jitter, and so on. Angular acceleration measurement methods can be divided into: direct measurement and indirect measurement. Direct measurement refers to the direct acquisition of angular acceleration information through sensors sensitive to angular acceleration. The indirect measurement method refers to collecting other signals related to angular acceleration, and then obtaining angular acceleration information through calculation. [0003] Direct measurement angular acceleration sensors mainly include: piezo...

AI Technical Summary

Problems solved by technology

It has the advantages of small size, light weight, and high reliability. Applying MEMS technology to angular accelerometers is the development direction of angular accelerometers. For example, Chinese invention patent No. CN200610011906 provides a torsional silicon MEMS angular acceleration sensor, but this This method has only been verified by simulation and has not been used in practice

[0006] The research on MEMS angular accelerometers at home and abroad is not so extensive, and there is no relatively mature MEMS angular accelerometer chip

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