Metal vibrating gyroscope inertial sensor and metal vibrating gyroscope
A vibrating gyroscope and sensor technology, applied in the field of inertial devices, can solve the problems that metal vibrating gyroscope inertial sensors cannot be vacuum packaged, the vacuum package sealing effect is poor, and the vacuum package is not easy to repeat, and the structure is compact and air tightness is improved. , Improve the effect of packaging repeatability
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[0025] The present invention will be further elaborated below by describing a preferred specific embodiment in detail in conjunction with the accompanying drawings.
[0026] like figure 1 As shown, a metal vibrating gyro inertial sensor includes: a gyro housing 100, the section of which is U-shaped; A support rod 201 extends from the middle of the bottom, and the support rod 201 points to the opening of the gyroscope cover 100. Several piezoelectric electrodes (not shown in the figure) are arranged on the bottom circumference of the metal resonator; the sealing base 300 is arranged on The opening of the gyroscope cover 100 is to seal the inner space of the gyroscope cover 100; the conductive ring 400 is arranged between the support rod 201 and the sealing base 300, and the diameter of the conductive ring 400 is the same as that of the support rod 201. The diameters are consistent, and the conductive ring 400 is configured as the ground electrode of the metal resonator 200; se...
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