A kind of weather-resistant high-efficiency solar energy selective absorption coating and preparation method thereof
An absorbing coating and selective technology, which is applied in the field of weather-resistant and high-efficiency solar selective absorbing coating and its preparation, can solve the problems of thermal emissivity of heat-absorbing surface that cannot be ignored, water heater system efficiency is not high, coating is easy to peel off, etc. , to achieve good selective absorption characteristics, good weather resistance, and good coating adhesion
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Embodiment 1
[0026] This embodiment provides a weather-resistant high-efficiency solar selective absorption coating. The coating system has a four-layer structure: TiCrMoN / CrMoON / CrON / SiON from inside to outside, wherein the composition of the infrared reflective layer TiCrMoN coating is as follows: Ti: 28.4 at.%, Cr: 19.6 at.%, Mo: 5 at.%, N: 47 at.%; the absorption layer CrMoON composition is as follows: Cr: 35.4 at.%, Mo: 15.3 at.%, O: 11.2 at.%, N: 38.1 at.%; the composition of CrON in the anti-reflection layer is as follows: Cr: 42 at.%, O: 10 at.%, N: 48 at.%; the composition of SiON in the anti-reflection layer is as follows: Si: 36 at .%, O: 18 at.%, N: 46 at.%.
[0027] The preparation method of the above-mentioned weather-resistant high-efficiency solar selective absorption coating comprises the following steps:
[0028] S1. After glow cleaning, reduce the substrate negative bias voltage to 100 V, close the Ar flow valve, and open the N 2 Flow valve, adjust the air pressure at ...
Embodiment 2
[0037] This embodiment provides a weather-resistant high-efficiency solar selective absorption coating. The coating system has a four-layer structure: TiCrMoN / CrMoON / CrON / SiON from inside to outside, wherein the composition of the infrared reflective layer TiCrMoN coating is as follows: Ti: 32 at.%, Cr: 20 at.%, Mo: 4.2 at.%, N: 43.8 at.%; the absorption layer CrMoON composition is as follows: Cr: 43at.%, Mo: 15.9 at.%, O: 6.1 at .%, N: 35 at.%; the composition of the anti-reflection layer CrON is as follows: Cr: 51.8 at.%, O: 7.1 at.%, N: 41.1 at.%; the composition of the anti-reflection layer SiON is as follows: Si: 36.2 at. %, O: 14.8 at.%, N: 49 at.%.
[0038] The preparation method of the above-mentioned weather-resistant high-efficiency solar selective absorption coating comprises the following steps:
[0039] S1. After glow cleaning, reduce the substrate negative bias voltage to 80 V, close the Ar flow valve, and open the N 2 Flow valve, adjust the air pressure at 1.0...
Embodiment 3
[0049] This embodiment provides a weather-resistant high-efficiency solar selective absorption coating. The coating system has a four-layer structure: TiCrMoN / CrMoON / CrON / SiON from inside to outside, wherein the composition of the infrared reflective layer TiCrMoN coating is as follows: Ti: 28.3 at.%, Cr: 18.2 at.%, Mo: 10 at.%, N: 43.5 at.%; absorption layer CrMoON composition is as follows: Cr: 40 at.%, Mo: 13 at.%, O: 12 at.%, N: 35 at.%; the composition of the anti-reflection layer CrON is as follows: Cr: 49 at.%, O: 12 at.%, N: 39 at.%; the composition of the anti-reflection layer SiON is as follows: Si: 40 at.%, O: 20 at.%, N: 40 at.%.
[0050] The preparation method of the above-mentioned weather-resistant high-efficiency solar selective absorption coating comprises the following steps:
[0051] S1. After glow cleaning, reduce the substrate negative bias voltage to 80 V, close the Ar flow valve, and open the N 2 Flow valve, adjust the air pressure at 1.5 Pa, turn on t...
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