Area array sensor device and method of forming the same

Abstract

An area array sensor device and its forming method, the area array sensor device includes: a drive circuit and a sensor circuit, the drive circuit and the sensor circuit are formed on the same substrate surface, and the sensor circuit includes a pixel unit array composed of pixel units and the driving line connected to the pixel unit, the output terminal of the driving circuit is connected to the driving line of the sensor circuit, the driving circuit includes a first transistor, and the pixel unit includes a second transistor; the first transistor includes The first shielding layer, the second transistor includes a second shielding layer. In the area array sensor device of the technical solution of the present invention, the components of the drive circuit and the sensor circuit can be manufactured on the same substrate, which reduces the occupied area and improves the reliability, and the formation process can be carried out synchronously without adding additional process steps.

Description

technical field [0001] The invention relates to the field of sensors, in particular to an area array fingerprint sensor device and a forming method thereof. Background technique [0002] The area sensor is a large-area planar imaging device, which is composed of a pixel unit array, driving lines, signal readout lines, etc. The optical signal with image information is directly projected to each pixel unit on the imaging surface of the sensor, and is absorbed by the pixel unit of the sensor to form an image. Since the light is focused without lenses or optical fibers, it is the same size and non-scaling imaging, so it will have better imaging quality; at the same time, the imaging equipment is lighter and thinner, so it has been widely used in various fields. [0003] For example, area array sensors used in fingerprint imaging, document scanning and other fields. Such as figure 1 As shown, the visible light penetrating from the back is irradiated to the object 13 that is cl...

AI Technical Summary

Problems solved by technology

[0007] The problem solved by the invention is that the reliability of the existing area array sensor is relatively poor, and the occupied area is relatively large

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