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Thermoacoustic device and manufacturing method thereof

A technology of thermal sound generation and carbon nanotube array, which is applied in thermoelectric effect transducers, sensors, electrical components, etc., and can solve problems such as high cost and complicated silicon etching process

Active Publication Date: 2018-05-01
TSINGHUA UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This kind of supporting element can be realized by etching the silicon substrate and other processes in the field of small-sized sound-emitting chips, but the silicon etching process is more complicated and the cost is higher

Method used

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  • Thermoacoustic device and manufacturing method thereof
  • Thermoacoustic device and manufacturing method thereof
  • Thermoacoustic device and manufacturing method thereof

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Embodiment Construction

[0039] The thermoacoustic device and its preparation method of the present invention will be further described in detail below with reference to the accompanying drawings.

[0040] see figure 1 , the present invention provides a thermoacoustic device 100 , including a substrate 30 , a first electrode 90 , a second electrode 92 , at least two supporting elements 80 and a first carbon nanotube film 40 . The first electrode 90 and the second electrode 92 are both disposed on the same surface 302 of the substrate 30 and spaced apart from each other. The at least two supporting elements 80 are spaced apart from each other and are respectively disposed on the surfaces of the first electrode 90 and the second electrode 92 . The first carbon nanotube film 40 is disposed on the surfaces of the at least two supporting elements 80 , and is partially suspended by the support of the at least two supporting elements 80 . The supporting element 80 is a conductive element, and electrically ...

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Abstract

A thermoacoustic device includes a base, a first electrode and a second electrode, at least two supporting members, and a first carbon nanotube film. The base includes a surface. The first electrode and the second electrode are located on the surface of the base and spaced from each other. The at least two supporting members are spaced from each other and respectively located on surfaces of the first electrode and the second electrode. The at least two supporting members include a plurality of carbon nanotubes parallel with each other and substantially perpendicular to the surface of the base. The first carbon nanotube film is supported by the at least two supporting members and has a portion between the at least two supporting members suspended above the base. The supporting members electrically connect the first carbon nanotube film with the first electrode and the second electrode.

Description

technical field [0001] The invention relates to a thermal sound generating device and a preparation method thereof. Background technique [0002] A thermoacoustic device is a sound device based on the thermoacoustic effect. Fan Shoushan and others disclosed a carbon nanotube-based The thermoacoustic device adopts carbon nanotube film as the thermoacoustic element. The carbon nanotube film has a large specific surface area and a small heat capacity per unit area (less than 2×10 -4 Joules per square centimeter Kelvin), which can quickly transfer the heat generated inside it to the surrounding medium. Therefore, under the action of the audio signal, the carbon nanotube film can rapidly rise and fall in temperature, and rapidly exchange heat with the surrounding medium, and the density of the surrounding medium also changes accordingly, and then emit sound waves through the movement of the medium molecules, that is, the carbon nanotube film The sounding principle of the nanot...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H04R23/00H04R31/00
CPCH04R23/002H04R31/006
Inventor 魏洋魏浩明林晓阳范守善
Owner TSINGHUA UNIV