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Transfer device and substrate processing device

A handling device and a technology for handling substrates, which are applied in transportation and packaging, electrical components, semiconductor/solid-state device manufacturing, etc., can solve problems such as substrate damage, and achieve the effect of reducing substrate damage and floating

Active Publication Date: 2018-04-10
DAINIPPON SCREEN MTG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Especially in recent years, the thinning of the substrate has been progressing. If air flow is generated around the substrate when the substrate is transported, a part of the substrate will be lifted from the substrate placement part, and there is a risk of damage to the substrate.
As such, there is room for improvement in existing technologies

Method used

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  • Transfer device and substrate processing device
  • Transfer device and substrate processing device
  • Transfer device and substrate processing device

Examples

Experimental program
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Effect test

Embodiment Construction

[0056] Embodiments of the present invention will be described below with reference to the drawings. In addition, the components described in this embodiment are merely illustrative, and the scope of the present invention is not limited thereto. In addition, in the drawings, for easy understanding, the size or number of each part may be exaggerated or simplified as necessary for illustration.

[0057]

[0058] figure 1 It is a schematic plan view showing the substrate processing apparatus 1 of the embodiment. The substrate processing apparatus 1 processes a rectangular glass substrate (hereinafter, simply referred to as “substrate”) 90 for manufacturing a screen panel of a liquid crystal display device using each processing section. also, figure 1 The shown arrangement of the respective processing units of the substrate processing apparatus 1 is an example, and the arrangement of the respective processing units is not limited thereto.

[0059] The substrate processing app...

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Abstract

The invention provides a transportation device and a substrate processing device which can reduce influences on a substrate by surrounding airflows when during transfer of the substrate. The transfer device (30a) is a device of a transfer substrate (90). The transfer device (30a) has a hand portion (313) maintaining the substrate (90), an elevating mechanism (32) enabling elevating of the hand portion (313) along a vertical direction, a rotation mechanism (33) enabling the hand portion (313) to rotate around a rotating axis in a vertical direction, a cover portion (34) rotating together with the hand portion (313) through the rotation mechanism (33) and a door portion (342). The hand portion is arranged in the cover portion (34). The transfer device (30a) has a first arm portion (311) and a second arm portion (312). Through making the hand portion (313) to move along a horizontal direction, the hand portion is enabled to move towards the inner side and the outer side of the cover portion (34) through an opening (OP) of the cover portion (34). The door portion (342) closes and opens the opening (OP) of the cover portion (34).

Description

technical field [0001] The invention relates to a technology for transferring a substrate. Background technique [0002] In the manufacturing process of precision electronic substrates such as liquid crystal display substrates and semiconductor wafers (hereinafter simply referred to as "substrates"), each processing section such as a cleaning processing section, a heat processing section, and a resist coating section is arranged at a predetermined position, and , in some cases, the substrate transfer device is arranged between the above-mentioned processing units. Then, a series of processes are performed by moving the substrates in and out of each processing unit while carrying the substrates in accordance with a predetermined conveying order by the substrate conveying device. [0003] As such a substrate transfer device, the substrate is placed above a hand (substrate support unit), and the hand is moved into and out of the processing unit by another drive mechanism. In ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/677
CPCH01L21/67706H01L21/67742
Inventor 柿村崇
Owner DAINIPPON SCREEN MTG CO LTD
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