MOCVD equipment spray head and vapour reaction control method thereof
A technology of gas phase reaction and control method, applied in the direction of gaseous chemical plating, metal material coating process, coating, etc., can solve problems such as gas phase pre-reaction, and achieve the effect of improving quality and accurately controlling quality
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[0036] The purpose of the invention, technical solutions and beneficial effects of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments:
[0037] refer to Figure 1 to Figure 2 , the present invention provides a preferred embodiment of the shower head of MOCVD equipment, the shower head of MOCVD equipment includes an air inlet device, a reaction chamber and a rotating base, wherein: the air inlet device includes a cover 10, and is arranged on the cover 10 The MO source channel 101, the protective gas channel 102, the oxygen source channel 103, and the observation channel 104. The cover body 10 is closely connected with the top of the reaction chamber, and the MO source channel 101 , the protective gas channel 102 , the oxygen source channel 103 and the observation channel 104 all extend to the reaction chamber. The protective gas channel 102 is arranged between the MO source channel 101 and the oxygen sou...
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