Multi-level switching linear composite piezoelectric ceramic driving power supply

Abstract

The present invention relates to a driving power supply, in particular to a multi-level switching linear composite piezoelectric ceramic driving power supply, and belongs to the field of piezoelectric ceramic driving. The multi-level switching linear composite piezoelectric ceramic driving power supply comprises a control circuit module, a rectifying and inverting module, a multi-level series connection module and an amplification output module. On the basis of ensuring sufficiently fast frequency response, the multi-level switching linear composite piezoelectric ceramic driving power supply provided by the present invention simultaneously realizes a high range, high linearity and high efficiency of an output voltage, wherein the high range of the output voltage is realized by adopting a multi-level series circuit, the high linearity of the output voltage is realized by adopting a linear push-pull circuit, and the high-efficiency output of the whole piezoelectric ceramic driving power supply is realized by adopting two push-pull circuits which keep dynamic voltages with small voltage difference to supply power to the amplification output module.

Description

technical field [0001] The invention relates to a driving power supply, in particular to a multi-level switch linear composite piezoelectric ceramic driving power supply, which belongs to the field of piezoelectric ceramic driving. Background technique [0002] In recent years, with the rapid development of microelectronics technology, aerospace, bioengineering and other disciplines, it has entered the "nano" era, and nanopositioning technology is an important part of modern high-precision manufacturing technology. Piezoelectric actuators have been used in high-precision control equipment that requires high-frequency motion, such as nanopositioning systems, high-speed micro-mechanical systems, scanning probe microscopes, and vibration control systems. [0003] Piezoelectric ceramic actuators are mainly based on the inverse piezoelectric effect, and use piezoelectric ceramics to deform under the action of an electric field to drive micro-displacement of actuators such as prob...

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Problems solved by technology

[0005] The purpose of the present invention is to provide a multi-level switch linear composite piezoelectric ceramic drive power supply to solve the problem that the existing technology cannot simultaneously meet the requirements of large output voltage range, high linearity, and high efficiency.

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