An exposure machine with coding function

An exposure machine and functional technology, applied in the field of exposure machines with coding function, can solve the problems of increasing difficulty, increasing the risk of product quality tracking in production lines, and increasing the difficulty of tracking abnormal products, so as to shorten production time and increase production capacity. Effect

Active Publication Date: 2018-05-04
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

This method increases the difficulty of product abnormality tracking, increases the difficulty of product abnormality analysis, and increases the risk of product quality tracking in the production line

Method used

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  • An exposure machine with coding function
  • An exposure machine with coding function
  • An exposure machine with coding function

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Experimental program
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Embodiment Construction

[0020] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0021] Such as figure 1 As shown, the exposure machine with coding function of the present invention includes an exposure system composed of a light source 1, a mask 2, an objective lens 3, a substrate 4, and a workpiece table 5 for pattern exposure of a substrate. It also includes a coding system composed of a light source 6, a coding system fixing module 7, a liquid crystal digital display mask 8, a coding position adjustment module 9, and coding and positioning software modules for coding during the exposure process. The coding system and the exposure system work at the same time. The coding system fixed module 7 is fixedly installed on both sides of the objective lens 3 lens barrel, such as figure 2 As shown, it includes a frame 10 and a guide rail 11. The liquid crystal digital display mask 8 is fixed on the guide rail 11. The guide ra...

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PUM

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Abstract

An exposure machine having a code printing function is disclosed. The exposure machine comprises an exposure system including a light source, a mash, an objective, a substrate and a workpieces stage. The exposure machine is characterized in that the exposure machine also comprises a code printing system, the code printing system comprises a light source, a code printing system fixing module, a liquid crystal digital display module, a code printing position adjusting module and a coding and positioning software module, and the code printing system and the exposure system work simultaneously. The exposure machine can print a code onto an edge screen of each exposure field at the same time of exposure, thus significantly shortening production time for subsequent titlers, and increasing the productivity of a whole production line without equipment configuration changes of the production line.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to an exposure machine with coding function used in the exposure process in the flat panel display field. Background technique [0002] In the TFT (Thin Film Transistor: Thin Film Transistor) panel manufacturing process of flat panel display, the exposure machine is used for the production of TFT device graphics, and the coder (Titler) is used for the coding production of each screen on the panel. This code is used to track the quality of each screen in the subsequent manufacturing process. Exposure machines and coding machines are equipped on the first-layer graphic production line of TFT panel manufacturing. [0003] At present, the market demand for mobile phone screens is very large. Many TFT production lines of medium and large generations have begun to switch to small-sized mobile phone screens. In this way, the number of screens made on the same generatio...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20
Inventor 李会丽林彬李志丹
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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