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Film forming device

A film-forming device and a technology for installing a device, which is applied in the direction of ion implantation plating, coating, electrical components, etc., can solve the problem of not finding a film-forming device, and achieve the effect of improving the use efficiency

Inactive Publication Date: 2016-04-27
ULVAC INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0016] In addition, the film forming apparatus using the rotation and revolution jig is described in, for example, Japanese Patent Application Laid-Open No. 57-70274 and Japanese Patent Application Publication No. 2002-164303, and the technique of forming a film without forming a gap is described in Japanese Patent Application Laid-Open No. 57-70274, for example. No. 2012-224878, the technique of improving the device using the rotation and revolution jig is described in, for example, Japanese Patent No. 2762948, but no film forming device with the rotation and revolution jig that reduces the gap is found

Method used

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Embodiment approach

[0044] figure 1 The film forming apparatus 2 of the present invention is shown.

[0045] The film forming apparatus 2 has a vacuum chamber 11 , and a circular rail 16 is disposed inside the vacuum chamber 11 and fixed to the vacuum chamber 11 .

[0046] In the inside of the vacuum tank 11, more than five (in figure 1 5 in the center) rotation and revolution fixture 21 1 ~21 5 and keep the respective revolution fixtures 21 1 ~21 5 The fixture installation device 20.

[0047] exist figure 2 A clamp mounting device 20 is shown in . The fixture installation device 20 has: a main rotating shaft 34, which is airtightly inserted through the ceiling of the vacuum tank 11; a top plate 30, which is arranged inside the vacuum tank 11, and is installed on the lower end of the main rotating shaft 34; an arm 31, whose upper part is arranged on the top plate 30 ; and a frame body 32 provided on the lower part of the arm 31 .

[0048] In this example, the arm 31, with the rotation...

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Abstract

The invention relates to film forming devices and provides a film forming device which is high in productivity. The inclinations of multiple rotary and revolutionary jigs (211 to 215) are increased, so that the front head side and the rear tail side of each two adjoining jigs among the jigs (211 to 215) are made to coincide. When the rotary and revolutionary jigs (211 to 215) are made to rotate with the jig rotation axes (29) as the centers and convolute and move with the main rotation axis (12) as the center at the same time, film forming material particles discharged from a film forming source (15) reach base plates (26) maintained through the corresponding rotary and revolutionary jigs (211 to 215), and a thin film is formed. As the gaps among the rotary and revolutionary jigs (211 to 215) are small, the using efficiency of a film forming material (15b) is improved.

Description

technical field [0001] The present invention relates to the technical field of a film-forming device for forming a thin film in a vacuum atmosphere, and in particular to the technical field of a film-forming device using a self-rotating and revolving jig. Background technique [0002] In the case of forming a thin film in a vacuum atmosphere, there are a block-by-block type film-forming apparatus that forms a film on a substrate one by one, and a batch-type film-forming apparatus that forms a film on a plurality of substrates at a time. There is known a film forming apparatus that mounts a plurality of substrates on a rotary jig and forms a thin film while rotating the rotary jig. [0003] Figure 10 The symbol 102 in the figure is the vacuum film forming apparatus of the prior art, and inside the vacuum tank 111, a circular track 116 fixed to the vacuum tank 111, and a plurality of (here, three) rotation and revolution jigs 121 are arranged. 1 ~121 3 and a film forming so...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/56C23C14/50
CPCC23C14/50H01L21/285H01L21/683
Inventor 永谷浩治本田优治
Owner ULVAC INC