Valveless electrostatic micropump with low reverse drive voltage and double-sided pump diaphragms, and preparation method thereof

Abstract

The invention discloses a valveless electrostatic micropump with a low reverse drive voltage and double-sided pump diaphragms, and a preparation method thereof in the technical field of microfluidics. The electrostatic micropump is of a vertical symmetrical structure taking a pump cavity as a symmetrical axis, drive units are arranged at an upper side and a lower side of the pump cavity respectively, and an inlet and an outlet are formed in a left end and a right end respectively; each drive unit sequentially comprises a fixed electrode, an insulation layer, an isolation layer and the corresponding pump diaphragm from the outside to the inside, and the interior of each isolation layer is of a discontinuous structure so as to form a drive unit cavity for ensuring a vibration space of the corresponding pump diaphragm; and a deviation degree of a frequency of the reverse drive voltage applied onto each fixed electrode and an intrinsic frequency of the corresponding pump diaphragm is 0-10%, so as to obtain a resonance effect, and thus an amplitude of the corresponding pump diaphragm is increased. According to the electrostatic micropump, the drive voltage needed by the electrostatic micropump is remarkably lowered in case of a fixed structure of the micropump, and a high pump output can be obtained under the low drive voltage, so that the working efficiency of the micropump is increased.

Description

technical field [0001] The invention belongs to the technical field of microfluidics, and in particular relates to a reverse low driving voltage double-side pump membrane valveless electrostatic micropump and a preparation method thereof. Background technique [0002] As an actuator, the micropump is one of the important components in the microfluidic system. It can be used for the delivery of microelectronic liquids and gas coolants, the precise delivery of chemical products and valuable drugs, the delivery of drugs in the human body, and micro-aerospace. Device fuel supply and many other fields. The development of micropumps has become an important symbol of the development level of microfluidic systems. [0003] At present, micropumps designed with MEMS processing technology can be divided into mechanical micropumps and non-mechanical micropumps according to their working principles. At present, the mechanical micropump is dominant, and its unique feature is that one si...

AI Technical Summary

Problems solved by technology

The pumping volume of microfluid in the pump chamber is the core performance index in the application of micropumps, and the bottleneck faced by the development of electrostatic micropumps is excessive driving voltage

Usually, because the pump membrane often faces the problem of electrostatic adsorption, in order to obtain an appropriate pumping volume, the distance between the electrodes can only be lengthened; the pressure generated by static electricity is proportional to the square of the voltage applied to the electrodes, and the square of the distance between the electrodes Inversely proportional, in the case of limited pump membrane amplitude, this will lead to a synchronous increase of the driving voltage, and usually the driving force and stroke of the micropump are too small at this time, and the pumping volume is low, which limits the application of the micropump, so it is sought Electrostatic micropump technology with low driving voltage has important application prospects

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