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Method for evenly depositing sic coating on the surface of carbon material in graphite heating element furnace
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A graphite heating and carbon material technology, applied in the field of preparing SiC coatings, can solve problems such as uneven distribution of temperature zones, uneven coating effect quality, and large differences in coating effects, achieving low cost and high coating thickness. Flexible and controllable, the effect of large coating thickness
Active Publication Date: 2018-03-23
SUZHOU HONGJIU AVIATION THERMAL MATERIALS TECH CO LTD
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Problems solved by technology
This method ignores a problem, that is, the temperature distribution in the furnace is uneven, and the actual temperature of the graphite heating element is often 100-300°C higher than that of other carbon materials in the furnace. If one-time deposition is used, the coating effect in different areas is very different. Large, the quality of the resulting coating effect varies
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Embodiment 1
[0019] A method for uniformly depositing a SiC coating on the surface of a carbon material in a graphite heating element heating furnace, characterized in that it comprises the steps in the following order:
[0020] (1) Use the heating body of the graphite heating element as the deposition furnace, and wrap the graphite heating element in the furnace with a layer of graphite paper. The graphite paper is close to the heating element, and there is no contact between adjacent graphite papers;
[0021] (2) Close the furnace cover and vacuumize it to a degree of vacuum of 200Pa;
[0022] (3) Raise the temperature in the graphite heating element heating furnace to 1100°C, and the heating rate is 10°C / min;
[0023] (4) Bring trichloromethylsilane vapor into the graphite heating element heating furnace chamber with a diameter of 1 meter, the flow rate is 50ml / min, and hydrogen with a purity of 99.9999% is used as the reaction gas, and the flow rate is 500ml / min. Argon gas with a puri...
Embodiment 2
[0028] A method for uniformly depositing a SiC coating on the surface of a carbon material in a graphite heating element heating furnace, characterized in that it comprises the steps in the following order:
[0029] (1) Use the heating body of the graphite heating element as the deposition furnace, and wrap the graphite heating element in the furnace with a layer of graphite paper. The graphite paper is close to the heating element, and there is no contact between adjacent graphite papers;
[0030] (2) Close the furnace cover and vacuum it up to 100Pa;
[0031] (3) Raise the temperature in the graphite heating element heating furnace to 1150°C, and the heating rate is 10°C / min;
[0032] (4) Bring trichloromethylsilane vapor into the graphite heating element heating chamber with a diameter of 1.5 meters, the flow rate is 100ml / min, and hydrogen with a purity of 99.9999% is used as the reaction gas, and the flow rate is 1000ml / min. Argon gas with a purity of 99.9999% is used as...
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Abstract
The invention discloses a method for evenly depositing an SiC coating on the surface of a carbon material in a graphite heater heating furnace, comprising the following steps: (1) by taking a graphite heater heating furnace body as a depositing furnace, coating a heater with graphite paper; (2) vacuumizing to enable the vacuum degree to be below 500Pa; (3) increasing an internal temperature to 1000-1300 DEG C; (4) taking methyl silicochloroform steam into a graphite heater heating furnace chamber, meanwhile by taking hydrogen as a reaction gas and argon as a diluent gas, depositing for 10-50h, and then furnace-cooling; (5) taking out the graphite paper covering the graphite heater, and repeating the process of the step (2); (6) increasing the internal temperature of the graphite heater heating furnace to 700-900 DEG C; (7) repeating the process of the step (4), thus forming the uniform SiC coating on the surface of the carbon material in the furnace after cooling. The method has the advantages that the SiC coating uniformly covers in the furnace, special chemical vapor deposition equipment is not needed in the preparation process of the coating, the cost is low, and the coating thickness is great and can be flexibly controlled.
Description
technical field [0001] The invention relates to a method for preparing a SiC coating, in particular to a method for uniformly depositing an SiC coating on the surface of a carbon material in a graphite heating element heating furnace. Background technique [0002] Photovoltaic industry is a green industry, for reducing CO 2 And PM2.5 emissions are of great significance, and have entered a mature stage, and the direction of industrial development is to reduce the cost of chips and increase the photoelectric conversion rate. There are currently 10,000 wafer furnaces in my country, and 20,000 wafer furnaces abroad. Every 80 furnaces change the thermal field material every one year, and the thermal field material for each furnace is about 150,000-250,000. The annual consumption of consumables in China alone is 2 billion. The thermal field materials in the silicon wafer furnace are all high-strength and high-purity graphite, and the working temperature is as high as 1600°C. At t...
Claims
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Application Information
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