A surface detection method and device

Abstract

The invention relates to a surface detection method and device. The device comprises: a loading platform for placing a to-be-detected object; a light source system for providing a light source to the to-be-detected object; a detection camera for acquiring the image of the to-be-detected object under the illumination of the light source system; a blowing unit for blowing the surface of the to-be-detected object to remove foreign matters; and a control unit for processing the image acquired by the detection camera to obtain a corresponding surface defect and area. The method and the device provided by the invention reduce the adjustment of detection experience parameters, lower the difficulty of illumination mode and the complexity of defect detection algorithm, and also greatly improve the detection accuracy.

Description

technical field [0001] The invention relates to a surface detection device and method. Background technique [0002] Surface inspection, especially the detection of small surface defects, has always been interfered by removable foreign matter such as environmental dust and hair on the surface of the object. Since the features of removable foreign matter such as environmental dust and hairs in the detection image are very close to surface microscopic defects (such as bumps, pits, scratches, coating peeling, etc.), it is almost impossible to distinguish them correctly. Therefore, the accuracy of the detection equipment is not high, and the misjudgment is large, which seriously affects the efficacy of the detection equipment. [0003] If you only use the image difference of multiple images under the same lighting conditions cleaned by blowing to eliminate the removable foreign matter, the image signal of the actual defect position will fluctuate due to environmental influences...

AI Technical Summary

Problems solved by technology

Since the features of removable foreign matter such as environmental dust and wool in the detection image are very close to the microscopic defects on the surface (such as bumps, pits, scratches, coating peeling, etc.), it is almost impossible to distinguish them correctly

Therefore, the accuracy of the detection equipment is not high, and the misjudgment is large, which seriously affects the efficacy of the detection equipment.

[0003] If you only use the image difference of multiple images under the same lighting conditions cleaned by blowing to eliminate the removable foreign matter, the image signal of the actual defect position will fluctuate due to environmental influences, fluctuations in the light source, and signal noise of the camera, etc., so it is easy to cause Missed judgment of actual defects (excluded due to differences in fluctuations)

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