Photoelectric equipment multi-optical-axis parallelism quantitative detection device
A technology for quantitative detection and optoelectronic equipment, which is applied to measurement devices, the use of optical devices, and the testing of optical performance. , to meet the effect of accurate detection of wide-spacing optical axis parallelism
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[0021]A photoelectric device multi-optical axis parallelism quantitative detection equipment, including off-axis folding aspheric optical system, CCD image sensor 5, two-dimensional translation stage 6, pentaprism assembly 8, bracket group 7 and control system, the off-axis The folded double-mirror optical system includes a housing 1, an aspheric primary mirror 2, an aspheric secondary mirror 3, and a turning prism group 4. The aspheric primary mirror 2 and the aspheric secondary mirror 3 in the housing 1 form a collimated light pipe. Both the aspheric primary mirror 1 and the aspheric secondary mirror 2 adopt hyperboloid reflectors to form an off-axis Cassegrain type collimator, the curvature of the aspheric primary mirror 2 is -400.17mm, and the off-axis amount is 102.5, The curvature of the aspheric secondary mirror 3 is -129.77 mm, and the off-axis distance is 24 mm. The distance between the aspheric primary mirror 2 and the aspheric secondary mirror 3 is 153 mm. The cross...
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