Absolute grating ruler, its main grating and its measuring method
A main grating and grating ruler technology, applied in the field of measurement, can solve the problem that the reference code track and the incremental code track cannot be measured two-dimensionally
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[0022] The preferred embodiments of the invention will be further described in detail below.
[0023] figure 1 As shown, an embodiment of an absolute grating scale includes a main grating 15 and a reading head component, and the reading head component includes an incremental displacement measurement unit 23 and a reference position measurement unit 22, wherein the reference position measurement unit 22 It includes a first spectroscope 12 , a mask plate 13 and a reference position photodetector 14 , and several reference codes 2 are distributed on the main grating 15 .
[0024] The first beam splitter 12 divides the light from the light source 11 (such as a laser diode) into two beams of laser light: one beam is directed to the main grating, and the other beam is directed to the incremental displacement measurement unit 23 for measuring The incremental displacement by which the readhead moves relative to the main grating 15. The light beam directed to the main grating passes ...
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