Piezoelectric bimorph type inertial piezoelectric motor

A technology of piezoelectric bimorphs and piezoelectric motors, applied in the field of piezoelectric components, can solve problems such as limiting the popularization of piezoelectric motors, restricting the development of nanotechnology, and the price of multiple piezoelectric sheets, so as to save materials and reduce costs , the effect of reducing the production cost

Inactive Publication Date: 2016-06-01
HENAN NORMAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

There are many types of piezoelectric motors, but they usually have disadvantages such as the use of high-voltage drive, the need for multiple piezoelectric sheets, and the use of expensive piezoelectric tubes, which limits the widespread use of piezoelectric motors and restricts the development of nanotechnology. develop

Method used

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  • Piezoelectric bimorph type inertial piezoelectric motor
  • Piezoelectric bimorph type inertial piezoelectric motor
  • Piezoelectric bimorph type inertial piezoelectric motor

Examples

Experimental program
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Effect test

Embodiment 1

[0030] An inertial piezoelectric motor made of piezoelectric bimorphs with the widest surfaces of two piezoelectric sheets fully bonded. In this embodiment, there are 1 mm uncoated electrode parts 5 at both ends of the widest surface of the piezoelectric ceramic sheet. The base and the guide rail are both Stainless steel.

[0031] The manufacturing process of the piezoelectric bimorph inertial piezoelectric motor of the present embodiment is as follows:

[0032] (1) Select the piezoelectric bimorph with the widest surface of the two piezoelectric ceramic sheets fully bonded. The size of the two piezoelectric ceramic sheets is 30*5*0.5mm and the thickness direction is polarized so that it stands vertically on the stainless steel base. and between the rails;

[0033] (2) Use epoxy resin AB glue 353ND, and apply them to the contact parts of the piezoelectric bimorph and the stainless steel base and guide rail respectively;

[0034] (3) drying it to obtain the piezoelectric bimo...

Embodiment 2

[0036] The piezoelectric bimorph inertial piezoelectric motor produced by fixing the two ends of the two piezoelectric sheets between the base and the guide rail. In this embodiment, there are 1 mm uncoated electrode parts 5 at both ends of the widest surface of the piezoelectric ceramic sheet. Rails and base are stainless steel.

[0037] The manufacturing process of the piezoelectric bimorph inertial piezoelectric motor of the present embodiment is as follows:

[0038] (1) Prepare two piezoelectric ceramic sheets with dimensions of 30*5*0.5mm and polarized in the thickness direction. The two widest surfaces of the piezoelectric ceramic sheets have been coated with electrodes and 1mm at both ends are not coated. Electrode site;

[0039] (2) Place the two piezoelectric ceramic sheets in parallel between the stainless steel guide rail and the base, the two piezoelectric ceramic sheets are perpendicular to the base and the guide rail, and the distance between the two piezoelectr...

Embodiment 3

[0044] An inertial piezoelectric motor made of a piezoelectric bimorph fixed at both ends of the two piezoelectric sheets with insulating substrates. In this embodiment, the two widest surfaces of the piezoelectric ceramic sheet are all coated with electrodes, and both ends are fixed with sapphire sheets. and base are stainless steel.

[0045] The preparation process of the piezoelectric bimorph inertial piezoelectric motor of this embodiment is as follows:

[0046] (1) Prepare a piezoelectric bimorph fixed with sapphire sheets at both ends of the piezoelectric ceramic sheet. The size of the piezoelectric ceramic sheet is 30*5*0.5mm, polarized in the thickness direction, and the two widest surfaces are all coated with electrodes. Two piezoelectric ceramic sheets are vertically fixed between the sapphire sheets and the two piezoelectric ceramic sheets are arranged parallel to each other, and the distance between the two piezoelectric ceramic sheets is 3mm;

[0047] (2) Place t...

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PUM

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Abstract

The invention discloses a piezoelectric bimorph type inertial piezoelectric motor, and belongs to the technical field of the piezoelectric motor. According to the key points of the technical scheme, the piezoelectric bimorph type inertial piezoelectric motor comprises a base, two piezoelectric patches and a guide rail, wherein the two piezoelectric patches are arranged between the base and the guide rail in parallel; one ends of the piezoelectric patches are perpendicularly fixed to the base through adhesive while the guide rail is fixed to the other ends of the piezoelectric patches through adhesive; the piezoelectric patches are polarized along a thickness direction or a radial direction; and the direction of the groove of the guide rail is consistent with the polarized direction of the piezoelectric patches. The piezoelectric bimorph type inertial piezoelectric motor is relatively low in manufacturing cost, simple in process, easy to operate, and stable and diversified in structure; and in addition, the manufactured piezoelectric motor can be driven by a low voltage, so that the piezoelectric motor is safer and more excellent in performance, and can be widely applied in the applications of micro-nano manipulation and control fields.

Description

technical field [0001] The invention belongs to the technical field of piezoelectric components, in particular to a piezoelectric bimorph inertial piezoelectric motor. Background technique [0002] With the development of nanotechnology, the piezoelectric motor known for its nanometer precision is widely used. It has the advantages of high control precision, fast response speed and low operating noise. It can be used as a probe in the scanning probe microscope (SPM) The needle driver can also be used as the driving element of the micro-nano operation and positioning system, and has a wide range of applications in the high-tech field. There are many types of piezoelectric motors, but they usually have disadvantages such as the use of high-voltage drive, the need for multiple piezoelectric sheets, and the use of expensive piezoelectric tubes, which limits the widespread use of piezoelectric motors and restricts the development of nanotechnology. develop. With the support of ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/04
CPCH02N2/04
Inventor 李全锋孙涵崔明焕付士林赵雯
Owner HENAN NORMAL UNIV
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