Piezoelectric single wafer type inertia piezoelectric motor

A piezoelectric single crystal and piezoelectric motor technology, which can be used in generators/motors, piezoelectric effect/electrostrictive or magnetostrictive motors, electrical components, etc. The development of science and technology, the price of multiple piezoelectric sheets, etc., to achieve the effect of saving materials, reducing costs, and reducing production costs

Inactive Publication Date: 2016-06-08
HENAN NORMAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

There are many types of piezoelectric motors, but they usually have disadvantages such as the use of high-voltage drive, the need for multiple piezoelectric sheets, and the use of expensive piezoelectric tubes, which limits the widespread use of piezoelectric motors and restricts the development of nanotechnology. develop

Method used

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  • Piezoelectric single wafer type inertia piezoelectric motor
  • Piezoelectric single wafer type inertia piezoelectric motor
  • Piezoelectric single wafer type inertia piezoelectric motor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] An inertial piezoelectric motor made of a piezoelectric single chip that is completely bonded to the widest surface of the piezoelectric sheet and the non-piezoelectric material support. In this embodiment, there are 1mm uncoated electrode parts 5 at both ends of the widest surface of the piezoelectric ceramic sheet. Base and rails are stainless steel.

[0034] The manufacturing process of the piezoelectric single-chip inertial piezoelectric motor of this embodiment is as follows:

[0035] (1) Select a piezoelectric single chip that is completely bonded to the widest surface of the piezoelectric sheet and the non-piezoelectric material support, so that it stands vertically between the stainless steel base and the guide rail;

[0036] (2) Use epoxy resin AB glue 353ND, and apply it on the contact part between the piezoelectric single chip and the stainless steel base and the guide rail;

[0037] (3) drying it to obtain the piezoelectric single-chip inertial piezoelectri...

Embodiment 2

[0039] A piezoelectric monolithic inertial piezoelectric motor produced by fixing both ends of the piezoelectric sheet and the non-piezoelectric material support between the base and the guide rail. In this embodiment, the piezoelectric ceramic sheet is polarized along the thickness direction and has the widest surface There are 1 mm uncoated electrode parts 5 at both ends, and the non-piezoelectric material support body, base and guide rail are all stainless steel.

[0040] The manufacturing process of the piezoelectric single-chip inertial piezoelectric motor of this embodiment is as follows:

[0041] (1) Use piezoelectric ceramic sheets and stainless steel sheets with a size of 30*5*0.5mm;

[0042] (2) Place the piezoelectric ceramic sheet and the stainless steel sheet in parallel between the base and the guide rail, and set the piezoelectric ceramic sheet and the stainless steel sheet perpendicular to the base and the guide rail respectively. The distance between the piezo...

Embodiment 3

[0047] An inertial piezoelectric motor made of a piezoelectric single chip with both ends of the piezoelectric sheet and a non-piezoelectric material support body fixed with an insulating film. The electric single chip, its preparation method is the same as the manufacturing process of the piezoelectric single chip type inertial piezoelectric motor in embodiment 1.

[0048] The piezoelectric single-chip inertial piezoelectric motor of this embodiment uses a piezoelectric single-chip fixed with sapphire sheets at both ends of the piezoelectric sheet and the stainless steel sheet, which not only plays the role of insulation, but also plays a role of fixing. The overall structure Beautiful and practical.

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Abstract

The invention discloses a piezoelectric single wafer type inertia piezoelectric motor, and belongs to the technical field of piezoelectric motors. According to the technical scheme, the piezoelectric single wafer type inertia piezoelectric motor comprises a base, a piezoelectric plate, a non-piezoelectric material support body and a guide rail; the piezoelectric plate and the non-piezoelectric material support body are arranged between the base and the guide rail, one end of the piezoelectric plate is perpendicularly fixed to the base through a colloid, the other end of the piezoelectric plate is fixedly provided with the guide rail through a colloid, a piezoelectric plate which is polarized in the thickness direction or radial direction is adopted as the piezoelectric plate, and the groove direction of the guide rail is consistent with the polarization direction of the piezoelectric plate. The piezoelectric motor is low in manufacturing cost, simple in technology, easy to operate and stable and diverse in structure; the manufactured piezoelectric motor can be driven by low voltage, is safer and good in performance and has the wide application prospect in the micro-nano manipulation and control field.

Description

technical field [0001] The invention belongs to the technical field of piezoelectric motors, and in particular relates to a piezoelectric single-chip inertial piezoelectric motor. Background technique [0002] With the development of nanotechnology, the piezoelectric motor known for its nanometer precision is widely used. It has the advantages of high control precision, fast response speed and low operating noise. It can be used as a probe in scanning probe microscope (SPM) scanning. The drive can also be used as the drive element of the micro-nano operation and positioning system, and has a wide range of applications in the high-tech field. There are many types of piezoelectric motors, but they usually have disadvantages such as the use of high-voltage drive, the need for multiple piezoelectric sheets, and the use of expensive piezoelectric tubes, which limits the widespread use of piezoelectric motors and restricts the development of nanotechnology. develop. With the sup...

Claims

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Application Information

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IPC IPC(8): H02N2/02H02N2/04
CPCH02N2/02H02N2/04
Inventor 李全锋孙涵崔明焕付士林赵雯
Owner HENAN NORMAL UNIV
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