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A Remote Reduction Furnace Flow Monitoring System

A flow monitoring and reduction furnace technology, applied in the direction of measuring flow/mass flow, liquid/fluid solid measurement, measuring devices, etc., can solve problems such as difficulty in re-acquisition, unspecified correction coefficients, etc., to reduce pipeline laying costs, flow Effect of improved monitoring accuracy

Active Publication Date: 2019-03-19
邳州市滨河中小企业管理服务有限公司
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Problems solved by technology

[0004] However, this method is mainly proposed from the perspective of ordinary small-range flowmeters, and it does not clearly record the correction coefficient. For those skilled in the art, in order to obtain accurate flow measurement, it is relatively difficult to obtain it through a large number of experiments during implementation. difficult

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  • A Remote Reduction Furnace Flow Monitoring System
  • A Remote Reduction Furnace Flow Monitoring System
  • A Remote Reduction Furnace Flow Monitoring System

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Embodiment Construction

[0028] Such as figure 1 As shown, the remote reduction furnace flow monitoring system of the present invention is used to monitor the flow of a certain gas supplied to the reduction furnace, including a pipeline subsystem, an ultrasonic detection subsystem, and a processing subsystem, wherein the ultrasonic detection subsystem is set Inside the pipeline subsystem ( figure 1 It is schematically shown as being coupled with the pipeline subsystem), and the processing subsystem is used to obtain the flow monitoring information of the gas supply to the reduction furnace from the ultrasonic detection subsystem.

[0029] Wherein, the pipeline subsystem includes a first gas supply pipeline, a second gas supply pipeline and a third gas supply pipeline, and the first gas supply pipeline, the second gas supply pipeline and the third gas supply pipeline are used to supply the reduction furnace with Gases are provided, the inner diameters of which are r, the lengths are L, the material is...

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Abstract

The invention provides a monitoring system for remote reduction furnace flow, for the purpose of avoiding the defects of the prior art and causing the gas flow measurement to be easily implemented. The monitoring system is used for monitoring the flow of a gas supplied to a reduction furnace and comprises a pipeline subsystem, an ultrasonic testing subsystem and a processing subsystem, wherein the ultrasonic testing subsystem is arranged in the pipeline subsystem; and the processing subsystem is used for acquiring the monitoring information of the flow of the gas supplied to the reduction furnace from the ultrasonic testing subsystem. The ultrasonic flow detection naturally has a large range ratio, so that the monitoring system compared with the prior art has the advantages that the paving cost of the pipeline is reduced and the monitoring system is more suitable for the industrial production and application in ratio change in a wider scope.

Description

technical field [0001] The invention relates to the technical field of gas flow monitoring, and more specifically, to a remote reduction furnace flow monitoring system. Background technique [0002] At present, the production of polysilicon mainly adopts the improved Siemens method. In the improved Siemens method, the main reaction in the hydrogen reduction process of trichlorosilane is that trichlorosilane is reduced by hydrogen to generate silicon and hydrogen chloride. According to the requirements of the improved Siemens method, the flow of hydrogen and trichlorosilane into the reduction furnace is measured during the production process, and polysilicon is produced through ratio control. The ratio of the flow rates of the two gases is related to the quality of polysilicon. [0003] After searching, the Chinese invention patent application with the application number CN201310703754.9 discloses a method for accurately measuring the flow rate of a reduction furnace. It ad...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01F1/66
CPCG01F1/667
Inventor 刘立峰芮立国
Owner 邳州市滨河中小企业管理服务有限公司
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