Piezoelectric element, manufacturing method thereof, and piezoelectric sensor

A technology for piezoelectric elements and manufacturing methods, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, components of piezoelectric devices or electrostrictive devices, electrical components, etc., capable of solving problems such as low sensitivity

Active Publication Date: 2016-06-08
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Existing piezoelectric elements of this type have low sensitivity

Method used

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  • Piezoelectric element, manufacturing method thereof, and piezoelectric sensor
  • Piezoelectric element, manufacturing method thereof, and piezoelectric sensor
  • Piezoelectric element, manufacturing method thereof, and piezoelectric sensor

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Embodiment Construction

[0041] In order to make the object, technical solution and advantages of the present invention clearer, the implementation manner of the present invention will be further described in detail below in conjunction with the accompanying drawings. It should be understood that the described embodiments are some, not all, embodiments of the present invention. Based on the described embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0042] It should be noted that various layers and / or regions shown in the drawings are not drawn to scale. And for ease of explanation in a given figure or embodiment, only one or more layers and / or regions of the type commonly used in such piezoelectric elements are explicitly shown or described. In particular, with respect to processing steps, the description provided herein is not intended to encompass a...

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Abstract

Embodiments of the present invention relates to a piezoelectric element, a manufacturing method thereof, and a piezoelectric sensor. The piezoelectric element comprises a piezoelectric member, a first substrate, a second substrate, a first electrode layer and a second electrode layer, wherein the first substrate and the second substrate are respectively arranged on the two sides of the piezoelectric member. The first electrode layer is arranged between the first substrate and the piezoelectric member, and the second electrode layer is arranged between the second substrate and the piezoelectric member. The surface of the first substrate and/or the surface of the second substrate layer, positioned closer to the piezoelectric member, are/is provided with lug bosses. According to the technical scheme of the invention, the sensitivity of the piezoelectric element is improved.

Description

technical field [0001] Embodiments of the present invention relate to the technical field of self-generating sensors, in particular to a piezoelectric element, a manufacturing method thereof, and a piezoelectric sensor. Background technique [0002] Harvesting energy from the living environment is an effective way to achieve green energy and energy sustainable development, and has been valued by the world. Among them, piezoelectric technology, as a new energy development technology, is widely used in various industrial fields and is expected to play an important role in environmental monitoring, energy-saving systems, implanted medical devices, and even consumer electronics. [0003] Piezoelectric technology is a technology based on the piezoelectric effect. When some dielectrics are deformed by external forces in a certain direction, polarization will occur inside them, and at the same time, opposite charges will appear on its two opposite surfaces. When the external forc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/16G01L9/08H01L41/047H01L41/04
CPCG01L1/16G01L9/08H10N30/80H10N30/87H10N30/878H10N30/8536H10N30/302H10N30/06H10N30/072H10N30/084H10N30/085H10N30/875
Inventor 田雪雁
Owner BOE TECH GRP CO LTD
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