A processing method for ultrasonic-assisted laser plasma backside wet etching of quartz glass

Abstract

The invention provides a method for etching quartz glass through an ultrasonic-assisted laser plasma back wet etching method and belongs to the field of non-traditional machining. The machining method mainly comprises four steps as follows: (1) the quartz glass is well clamped on a fixture, and a copper sulfate solution is added to a container; (2) laser system technological parameters and ultrasonic system technological parameters for laser etching of the quartz glass are determined; (3) a laser scanning path and scanning speed are determined; (4) the quartz glass is etched by an ultrasonic-assisted laser according to the scanning path. The method mainly adopts the laser back wet etching method for etching of the quartz glass, ultrasonic vibration, ultrasonic cleaning and the composite machining effect of ultrasonic vibration and ultrasonic cleaning are added on the basis of laser etching, and the quartz glass is etched through the ultrasonic-assisted laser plasma back wet etching method. With the adoption of the method, no obvious slag and recast layers exist on surfaces of grooves etched in surfaces of the quartz glass, the surfaces are smooth and clean, and the machining effect is good.

Description

Technical areas: [0001] The invention relates to a processing method for etching quartz glass using ultrasonic-assisted laser plasma back wet etching, and belongs to the application field of special processing. Background technique: [0002] Quartz glass has become a popular choice in the optoelectronics, microelectronics, optics and optical fiber industries due to a series of excellent physical and chemical properties such as high hardness, good thermal properties, acid and alkali resistance, high insulation, high light transmittance in various bands and good chemical stability. An important material with broad development prospects. With the development of modern science and technology, quartz glass has very high requirements for its processing accuracy and surface quality. However, because quartz glass is a hard and brittle material with high brittleness and low toughness, so The processing of this material is difficult. Traditional processing methods such as chemical etc...

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Problems solved by technology

However, there are also some problems in laser etching. For example, the surface layer of processed materials will leave a serious recast layer and inevitable residual stress and microcracks, which will directly affect the surface processing quality of quartz glass.

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