A Multilayer Electrode Displacement Sensor

Abstract

The invention discloses a multilayer electrode displacement sensor. According to the multilayer electrode displacement sensor, an emission electrode substrate is etched to form an emission electrode group of a grid-shaped electrode displacement sensor, a PCB is etched to form a grid-shaped emission leading-out electrode group, leading-out end positions of emission electrodes on the emission electrode substrate and conduction end portions of leading-out electrodes on the PCB respectively have same arrangement positions, the conduction end portions of the leading-out electrodes on the PCB are respectively aligned with the leading-out end positions of the emission electrodes on the emission electrode substrate in one-to-one correspondence, the conduction end portions of the leading-out electrodes on the PCB are respectively conducted with the leading-out end positions of the emission electrodes on the emission electrode substrate in one-to-one correspondence through a third-party conduction layer, so the emission electrodes on the glass substrate are respectively lead out to the PCB through the third-party conduction layer, the in-phase emission electrodes are mutually communicated through the multi-layer printed circuit board, and thereby the grid-shaped electrode displacement sensor is manufactured.

Description

technical field [0001] The invention relates to a sensor for measuring linear displacement and angular displacement, in particular to a capacitance grid displacement sensor and an inductance grid displacement sensor with grid electrodes. Background technique [0002] The grid electrode displacement sensor has the advantages of small size, low power consumption, and long-distance measurement, and has been widely used in displacement detection. The resolution of the grid electrode displacement sensor depends on the distance between adjacent grids. Taking the capacitance grid sensor as an example, the resolution of the usual 8-way drive phase detection type capacitance grid sensor is 0.01mm, the line spacing of adjacent emitter electrode grids is 0.635mm, the line width is 0.508mm, and the slit width is 0.127mm. There are 8 grids, and the actual sensor uses multiple sets of grids in parallel with a group spacing of 5.08mm to interconnect the electrodes of the same phase in eac...

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Problems solved by technology

This scheme is very effective, FPC metallized small hole technology is mature, FPC and conductive glass substrate crimping technology is also mature, but the problem with this method is that the FPC that plays the role of leading out and conducting the grid electrodes on the glass substrate It needs to be expanded to a larger size than the glass substrate for preparing the grid electrode, and more space is needed; the bigger problem is that the flexible FPC that plays the role of leading the grid electrode on the glass substrate is easy to deform, and it needs to be deformed during the preparation of the circular electrode. For two-dimensional grid electrodes such as disks, it is very difficult to align the terminals on the flexible FPC with the terminals on the rigid glass substrate

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