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Display substrate cooling device

A technology for display substrates and cooling equipment, applied in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve problems such as uneven thickness of the color filter film surface and poor flatness of the display substrate, and achieve dispersed gravity, uniform thickness, Apply a wide range of effects

Inactive Publication Date: 2016-07-27
BOE TECH GRP CO LTD +1
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  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

[0006] Aiming at the above-mentioned deficiencies in the prior art, the present invention provides a display substrate cooling device to solve the problem of uneven thickness of the color filter film surface and the problem of poor flatness of the display substrate

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  • Display substrate cooling device
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Embodiment Construction

[0040] The technical solutions in the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the present invention. Apparently, the described embodiments are part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0041] The embodiments of the present invention change the air supply direction of the existing air-cooling equipment and supply air from below the display substrate to prevent the cooling gas from directly acting on the color filter surface of the display substrate, effectively solving the problem of uneven thickness of the color filter surface and the display substrate. The problem of poor flatness.

[0042] The following combination figure 2 and image 3 , to describe the technical s...

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Abstract

The invention provides a display substrate cooling device. A display substrate is carried by a cooling disc, an air supply hole is formed in the cooling disc, an air supply device is used for delivering a cooling gas to the substrate base of the display substrate through the air supply hole from a part below the cooling disc, the cooling gas does not directly act on the surface of a color film of the display substrate while is blown to the back surface of the display substrate, so that the uniform thickness of the surface of the color film is ensured, and the product quality of the display substrate is improved; moreover, the quality of the surface of the color film of the cooled display substrate is not affected; and therefore, the display substrate cooling device provided by the invention also can be used for prebaking (curving after coating) and cooling of the color film substrate and is wider in application range.

Description

technical field [0001] The invention relates to the technical field of semiconductor equipment manufacturing, in particular to display substrate cooling equipment. Background technique [0002] The existing display substrate cooling mainly adopts two methods of water cooling and air cooling. The water cooling method is to densely cover the cooling water channels in the metal plate, and use the circulating flow of the cooling water to make the metal reach the same temperature as the cooling water. The display substrate is placed on the Metal plate, so as to realize the cooling of the display substrate. The main problem of the water cooling method is that it needs to consume a large amount of cooling water, and the energy consumption is high; the weight of the metal plate is high, and the hardware cost is high; the display substrate will generate static electricity when it leaves the metal plate, causing defects, especially the display substrate of the metal layer process. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67
CPCH01L21/67011
Inventor 邢淑影曹旭东杜强强
Owner BOE TECH GRP CO LTD
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