Dynamic seal rotary device
A rotary device and dynamic sealing technology, applied in the manufacturing of electrical components, semiconductor/solid-state devices, circuits, etc., can solve the problems of high manufacturing cost, difficult to guarantee the servo motor shaft seal, and great difficulty in shape differences, so as to avoid secondary pollution. , Solve the effect of complex structure and good sealing performance
Active Publication Date: 2018-05-18
THE 45TH RES INST OF CETC
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Problems solved by technology
Therefore, the design of the sealing device of the servo motor shaft is relatively complicated, there are many parts, the shape difference is large, it is difficult to process, and the manufacturing cost is high.
Despite the complex design, there is still a hidden danger that the servo motor shaft is difficult to seal during the long-term immersion and cleaning process of the structure
Method used
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[0015] Such as figure 1 , figure 2 , image 3 , Figure 4 As shown, the dynamic seal rotating device of the present invention includes a servo motor 1 and a motor fixing plate 2 . A circular box-shaped sealed casing 4 is connected below the motor fixing plate 2 . The output shaft of the servo motor 1 passes through the motor fixing plate 2 and is in the cavity of the sealed housing 4 . The output shaft of the servo motor 1 is tightly connected to a guide shaft 3 through a groove key. The bottom flange of the guide shaft 3 is connected to the motor transmission shaft 10 which is composed of a flange connection part, an optical shaft part and a carrier connection part. The shell bottom of the sealed shell 4 is provided with a central hole. The upper surface of the shell bottom is provided with a groove along the periphery of the central hole, and the lower surface of the shell bottom is provided with a protrusion along the periphery of the central hole. The lower end of ...
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The invention discloses a dynamic seal rotation apparatus which enables a motor to be installed on a top part of a rotation cleaning and spin-drying device. The dynamic seal rotation apparatus avoids the seal difficulty caused when the motor is installed to a lower part of the device, and at the same time saves manufacturing cost. The dynamic seal apparatus adopts three-layer sealing at places near a working area. The nitrogen which is filled to the inside of the sealed housing forms positive pressure protection, which enables the sealed housing to have better sealing property. The sprayed nitrogen prevents wafers that undergo cleaning and spin-drying from secondary contamination by solution water drops that are residual under a groove cover. The motor guiding axle is provided with a carrier connecting pin at a lower part thereof, which is easy for the mounting and dismounting of carriers, such as wafer clamps and rotation racks. According to the invention, the apparatus enables immersion, cleaning, and spin-drying to be completed in one device cavity in wet etching cleaning technology. The dynamic seal rotation apparatus overcomes the problems of complex structure and seal difficulty of traditional servo motor shaft seal apparatus, and also addresses the problem of rotation output of servo motor output shaft suspending wafer carrier.
Description
technical field [0001] The invention relates to a device for cleaning and drying semiconductor wafers, in particular to a dynamic seal rotating device for a servo motor in the cleaning and drying device. Background technique [0002] In the IC industry, spin washing and drying processes are an important part of wafer cleaning treatment. The servo motor in the traditional rotary washing and drying equipment is installed at the bottom of the equipment, and it is difficult to seal the servo motor shaft. Therefore, the design of the sealing device of the servo motor shaft is relatively complicated, with many parts and large differences in shape, making it difficult to process and high in manufacturing cost. Although the complex design is adopted, there is still a hidden danger that the sealing of the servo motor shaft is difficult to guarantee during the long-term immersion and cleaning process of the structure. For this reason, solving the difficulty of servo motor shaft seal...
Claims
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IPC IPC(8): H01L21/02H01L21/67
CPCH01L21/02068H01L21/02082H01L21/67023H01L21/6704
Inventor 王文丽陈仲武夏楠君祝福生张伟锋
Owner THE 45TH RES INST OF CETC