Short arc type flash lamp with both ends sealed

A flash lamp and sealing type technology, which is applied in the direction of discharge lamps, gas discharge lamps, parts of gas discharge lamps, etc., can solve problems such as the inability to obtain assembly structures, and achieve the effects of reducing risks and improving pressure resistance

Active Publication Date: 2016-08-31
USHIO DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0013] In such welding work, there is a problem that it is difficult to perform welding while maintaining the inner leads 12, 15, outer leads 13, 16, and metal foils 14, 17 on the outer periphery of the sealing glass tube 4 at correct positions. , The assembly structure at the correct position cannot be obtained after welding

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  • Short arc type flash lamp with both ends sealed
  • Short arc type flash lamp with both ends sealed
  • Short arc type flash lamp with both ends sealed

Examples

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Embodiment Construction

[0045] figure 1 It is a sectional view of the whole of the two-ends-sealed short-arc flash lamp with the lamp cap fixed in the present invention, figure 2 yes figure 1 The exploded and enlarged cross-sectional view of the main part.

[0046] This short-arc flashlight is a so-called sealed-end type, and its basic structure and Figure 4 The conventional example shown is the same. That is, it has, for example, an ellipse-shaped arc tube 1 forming a light-emitting space, a first sealing tube 2 connected to one end of the arc tube 1 and extending outward along the tube axis direction, and the other end connected to the arc tube 1. The second sealing tube 3 extending outward along the tube axis direction at one end is inserted into the second sealing tube 3 with the glass tube 4 for sealing, and both are welded in the overlapping region.

[0047] A pair of first main electrodes 5 and second main electrodes 6 are arranged to face each other in the arc tube 1 . The core wire 7...

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Abstract

The invention provides a short arc type flash lamp with both ends sealed. A light emitting tube is internally provided with a starting auxiliary electrode and a pair of main electrodes. In a first sealed tube of the light emitting tube, the core wire of a first main electrode is sealed and is leaded out of the light emitting electrode. A sealing glass tube is fused on a second sealed tube, and the core wire of a second main electrode is sealed in the sealing glass tube and is introduced out of the light emitting tube. In fusion operation of the second sealed tube and the sealing glass tube, correct fixing positions of an inner lead, an outer lead, a metal foil and the like of the starting auxiliary electrode can be obtained, thereby greatly simplifying packaging operation. On the outer peripheral surface of a fusion area between the sealing glass tube and the second sealed tube, a one-time sealing glass component is fused in a manner of covering the inner lead, the outer lead and the metal foil.

Description

technical field [0001] The present invention relates to both ends sealed type short arc flash lamp, particularly relates to both ends sealed type short arc flash lamp in which one sealed tube part is a double tube structure. Background technique [0002] Discharge lamps for flash lighting are widely used in industrial applications represented by flash annealing in semiconductor manufacturing processes, and the lamp of the present invention is particularly used in exposure processes using vacuum ultraviolet light. [0003] In the exposure process described above, it is required to use light close to parallel light that can irradiate a small area with high-density light in a short time and that has relatively little unevenness in directionality and distribution of light. [0004] For this reason, it is desired to condense the strobe lamp with a concave reflector or the like to form parallel light. In order to improve the light condensing efficiency, a short-arc strobe lamp wit...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J61/36
CPCH01J61/361H01J61/366
Inventor 加濑征彦平石隆之
Owner USHIO DENKI KK
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