Cleaning technology for changing metal surface activity
A metal surface and process technology, applied in the field of workpiece surface cleaning, can solve problems such as the inability to change the surface activity of the workpiece, the inability to meet the requirements of material adsorption, and the easy peeling of the workpiece skin.
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[0015] The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings. It should be noted here that the descriptions of these embodiments are used to help understand the present invention, but are not intended to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below may be combined with each other as long as they do not constitute a conflict with each other.
[0016] As shown in the figure, a cleaning process for changing metal surface activity includes three processes, which are hydrocarbon cleaning, vacuum bath cleaning and drying, and vacuum gas phase cleaning. Among them, hydrocarbon cleaning can be set according to the pollution degree of the workpiece surface. In this embodiment, hydrocarbon cleaning includes two hydrocarbon cleaning steps, that is, the process is as shown in the accompanying drawing, and since the imple...
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