Workpiece processing system and processing method
A technology of processing system and processing method, applied in the field of workpiece processing system
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[0048] Below, generally refer to the attached Figure 1 Embodiments of the workpiece processing system and processing method of the present invention will be described. In addition, the processing system illustrated in the figure includes an alarm device that issues an alarm when processing in any of the processing chambers cannot be performed, but a processing system that does not include an alarm device may also be used.
[0049] (Embodiment of Processing System and Processing Method of Workpiece)
[0050] figure 1 is a schematic diagram illustrating the workpiece processing system of the present invention, figure 2 It is a block diagram of the controller. The workpiece processing system 100 shown in the figure is roughly composed of the following devices: a plurality (N groups) of processing chambers 10 -1 、10 -2 ,...,10 -N The conveying device 20 that transports the workpiece between each processing chamber; The control device 30 that controls the timing of the work...
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