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Stocker and method for dispatching wafer carrier in stocker

A stocker, wafer technology, applied in the field of stockers, which can solve problems such as delays, traffic congestion, and reduced tool utilization

Active Publication Date: 2016-10-05
TAIWAN SEMICON MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Such demands include the necessity and increased volume of transport across ground and phases, the combination of which often results in traffic congestion, delays, and reduced tool utilization

Method used

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  • Stocker and method for dispatching wafer carrier in stocker
  • Stocker and method for dispatching wafer carrier in stocker
  • Stocker and method for dispatching wafer carrier in stocker

Examples

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Embodiment Construction

[0017] The following disclosure provides many different embodiments or examples for implementing different features of the presented subject matter. Specific examples of components and arrangements are described below to simplify the present disclosure. Of course, these are examples only and are not intended to limit the invention. For example, in the following description, forming a first component over or on a second component may include embodiments in which the first component and the second component are formed in direct contact, and may also include embodiments in which the first component and the second component may be formed in direct contact. An embodiment in which an additional part is formed so that the first part and the second part may not be in direct contact. In addition, the present invention may repeat reference numerals and / or letters in various instances. This repetition is for the sake of simplicity and clarity and does not in itself indicate a relations...

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PUM

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Abstract

A stocker includes a storage shelf, an output-relay shelf, a first crane, an output shelf, a second crane, and a controller. The storage shelf has a plurality of storage spaces. The output-relay shelf has a plurality of first output-relay spaces. The output shelf has an output space. The controller is configured to drive the first crane to preferentially transfer a first wafer carrier stored in one of the storage spaces to an empty one of the first output-relay spaces according to a delivery command defining a high priority of the first wafer carrier, and configured to drive the second crane to preferentially transfer the first wafer carrier from the first output-relay space storing the first wafer carrier to the output space according to the delivery command if the output space is empty. Embodiments of the present invention relate to a stocker and a method for dispatching a wafer carrier in the stocker.

Description

technical field [0001] Embodiments of the invention relate to a stocker and a method for scheduling wafer carriers in the stocker. Background technique [0002] The fabrication of semiconductor devices involves a series of process steps performed in a specific order and often within a specific period of time using various high-tech production and metrology tools. The primary function of a wafer logistics system in a semiconductor fabrication facility, or "foundry," is to deliver wafers to each tool at the right time, and to track the location and status of wafers throughout the process. [0003] Automated Material Handling Systems (AMHS) are used in foundries to perform automated functions more efficiently, consistently and safely than manual tools. Process and tool changes create additional demands on the AMHS. Such demands include the necessity and increased transport volumes across ground and inter-stage transportation, the combination of which often results in traffic ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677
CPCH01L21/67769H01L21/67733H01L21/67736H01L21/67766B65G1/0464
Inventor 王惟正李凤宁程炳源
Owner TAIWAN SEMICON MFG CO LTD
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