A z-x axis magnetoresistance sensor
A magnetoresistance sensor, Z-X technology, applied in the field of magnetic sensors, achieves the effect of simple structure, high sensitivity and small size of the sensor
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Embodiment 1
[0090] Figure 1-6 It is a schematic diagram of the measurement of several common gears, multi-poles and magnetoresistance sensors. figure 1 It is a measurement schematic diagram of a long bar gear and a magnetoresistive sensor, wherein 10 is a long bar gear, including a tooth head 20 and a tooth head gap 21, the distance between the two is the period interval of the long bar gear, and 40 is a gear sensor, It is located on a plane 81 parallel to the tooth top of the elongated gear, and has a certain gap from the tooth top, and also includes a back magnet 3 located on the surface of the gear sensor, wherein the gear sensor 40 is located between the back magnet 3 and the elongated gear 10, Wherein the elongated gear 10 is a soft magnetic alloy material, and the back magnet 3 is a hard magnetic alloy material.
[0091] figure 2 and image 3 There are two forms of measurement schematic diagrams for strip multi-pole and magnetoresistance sensors, among which figure 2 Medium a...
Embodiment 2
[0095] Figure 7 and 8 Respectively, the structure diagrams of traditional gear or multi-pole sensors 100 and 101, wherein the gear or multi-pole sensors 100 and 101 respectively comprise two sensing units 200, 201 and 300 and 301 separated by a characteristic pitch 1 and a characteristic pitch, wherein Figure 7 The two magnetoresistive sensing units 200 and 201 in have X-axis magnetic field sensitive directions Hx1 and Hx2, Figure 8 The two magneto-resistive sensing units 300 and 301 in have Z-axis magnetic field sensitivity directions Hz1 and Hz2. The above is the coordinate representation method under the strip-shaped magnetic pole or gear. For the wheel-shaped gear or magnetic pole, under polar coordinates, its The direction corresponding to the X axis is the Theta angle, and the direction corresponding to the Z axis is the r direction.
[0096] Figure 9 for correspondence Figure 7 and Figure 8 As shown in the signal output diagram of a traditional gear or multi-...
Embodiment 3
[0098] Figure 10It is a structural diagram of a single-chip Z-X magnetoresistance sensor proposed in this application, wherein the single-chip Z-X magnetoresistance sensor 102 includes a single magnetoresistance sensing unit 400, which can respond to the X-axis magnetic field and the Y-axis magnetic field, including X The axis magnetoresistive sensor and the Z axis magnetoresistive sensor, the X and Z axis magnetoresistive sensors have the same magnetic field sensitive area and are interlaced with each other.
[0099] Figure 11 for Figure 1-6 When the different types of gears or multi-pole sensors shown are working, when the gears or multi-poles move relative to the sensor for a periodic distance, the distribution diagram of the X-axis magnetic field component and the Z-axis magnetic field component at the sensor position can be seen. Both the X-axis magnetic field component Bx and the Z-axis magnetic field component Bz have sine and cosine characteristics, and the phase ...
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