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Pre-baking apparatus

A pre-baking and equipment technology, applied in the field of pre-baking equipment, can solve the problem of uneven heating of the glass substrate, and achieve the effect of uniform heating and uniform color of the color film

Active Publication Date: 2016-10-26
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Abstract
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  • Claims
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AI Technical Summary

Problems solved by technology

[0007] The invention provides a pre-baking equipment to solve the technical problem of uneven heating of the glass substrate when the pre-baking equipment heats the glass substrate in the prior art

Method used

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Embodiment Construction

[0029] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0030] see image 3 , image 3 It is a structural schematic diagram of the pre-baking equipment provided by a preferred embodiment of the present invention.

[0031] Such as image 3 As shown, the present invention provides a pre-baking device, which includes a hot plate 200 , a supporting device 300 and a compensating device 400 .

[0032] Wherein, the thermal plate 200 is provided with a plurality of through holes 210 (see Figure 4 ), the hot plate 200 ...

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Abstract

The invention provides a pre-baking apparatus. The pre-baking apparatus comprises a hot plate, a supporting device and a compensating device, wherein the hot plate is provided with a plurality of through holes and used for bearing and heating a glass substrate; the supporting device is used for passing through the plurality of through holes to support the glass substrate and to place the glass substrate down onto the hot plate; and the compensating device is used for sealing the plurality of through holes to allow the hot plate to uniformly heat the glass substrate. The pre-baking apparatus provided by the invention realizes uniform heating of the glass substrate due to arrangement of the compensating device capable of sealing the plurality of through holes in the hot plate, so a color film prepared in subsequent process is allowed to have a uniform color.

Description

technical field [0001] The invention relates to the field of liquid crystal panel manufacture, in particular to a pre-baking equipment for a glass substrate. Background technique [0002] LTPS (Low Temperature Poly-silicon, low temperature polysilicon technology) Mobile products increasingly have higher and higher requirements for color uniformity. Since the color of mobile is reflected by the color film, the specifications for the color uniformity of the color film are also becoming more and more demanding. high. [0003] The role of the pre-baking equipment is to volatilize 70% of the solvent of the photoresist coated on the glass substrate. The uniformity of heat conduction will lead to different degrees of photoresist volatilization on the glass, resulting in uneven color of the entire film surface. [0004] Please also refer to figure 1 and figure 2 ,in, figure 1 It is a structural schematic diagram of a pre-baking equipment in the prior art; figure 2 yes figur...

Claims

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Application Information

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IPC IPC(8): G03F7/38
Inventor 徐涛祖伟
Owner WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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