3d global pixel unit and preparation method thereof
A pixel unit, global technology, applied in electrical components, radiation control devices, semiconductor/solid-state device manufacturing, etc., can solve the problem of photosensitive units, storage capacitors and readout circuits easily interfering with each other, so as to improve optical isolation, reduce Small chip area, improved optical path effect
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[0050] In order to make the content of the present invention clearer and easier to understand, the content of the present invention will be further described below in conjunction with the accompanying drawings. Of course, the present invention is not limited to this specific embodiment, and general replacements known to those skilled in the art are also covered within the protection scope of the present invention.
[0051] In the present invention, the photosensitive unit of the first silicon substrate layer and the signal storage and readout unit of the second silicon substrate layer are arranged in the vertical direction, and the photosensitive unit is located above the signal storage and readout unit; through the first dielectric layer The connection with the second dielectric layer and the connection between the first direct connection structure and the second direct connection structure realize the interconnection between the photosensitive unit and the signal storage and ...
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