Linear inertial piezoelectric actuator with adjustable clamping force and its actuation method

Abstract

A linear inertial piezoelectric actuator with adjustable clamping force and its actuation method. The actuator consists of upper and lower frames, guide rails, output rods, double-diamond series drive mechanisms, piezoelectric stacks, and nuts required for adjustment. The double-diamond-shaped series driving mechanism includes a series-connected double-diamond-shaped ring. There is a friction block at the lower part of the connection between the two in series, and a symmetrical arc-shaped elastic element at the upper part. An adjustment block is bonded to the top of the elastic element; the bottom of the lower frame of the actuator is fixed. The guide rail is connected, the output rod is in contact with the guide rail through the lower slider, the upper surface of the output rod is in close contact with the friction block of the double diamond series drive mechanism equipped with piezoelectric stacks, the positive pressure between the two can be passed through the upper frame and the end surface Act on the screw adjustment of the adjustment block, during which the deformation is measured by the resistance strain gauge arranged on the surface of the elastic element, and the accurate value of the positive pressure is converted to obtain the clamping force of the actuator; the invention has the ability to measure and adjust the clamping force Features, simple assembly, quick response, precise movement.

Description

technical field [0001] The invention belongs to the technical field of inertial piezoelectric actuators, and in particular relates to a linear inertial piezoelectric actuator with adjustable clamping force and an actuating method. Background technique [0002] The working principle of piezoelectric drive is based on the inverse piezoelectric effect of piezoelectric. Piezoelectric drive has small size, high stiffness, high displacement resolution and positioning accuracy, good linearity, high frequency response, no heat, no noise, and easy to control Etc. [0003] Piezoelectric actuators have a wide range of application backgrounds in the fields of life science, medicine and biological engineering, semiconductor and microelectronics, data storage, optics, photonics, optical fiber, metrology and measurement technology, precision machinery and mechanical engineering. Among them, the inertial actuator is based on the piezoelectric drive principle of inertia-friction. Through th...

AI Technical Summary

Problems solved by technology

Although the inertial actuators in the past can drive a certain load, they cannot measure and adjust the clamping force in real time

In addition, the past piezoelectric actuators mostly adopt the energized clamping method, and in the application where the system is required to maintain the output displacement even when the power is off, the past actuators cannot complete such tasks

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