Oxidized grapheme quantum dot humidity sensor and preparation method thereof
A technology of graphene quantum dots and humidity sensors, which is applied in the direction of instruments, measuring devices, scientific instruments, etc., can solve the problems of thick humidity sensitive film, easy to be eroded by external water vapor, poor adhesion between film and substrate, etc., and achieve strong resistance Electromagnetic interference capability, beneficial to electronic conduction, and fast response speed
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0022] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation modes, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention.
[0023] A preparation method for graphene oxide quantum dot humidity sensor, comprising the following steps:
[0024] (1), clean the silicon substrate, form a layer of silicon dioxide on the surface of the silicon substrate by thermal oxidation, and then form the first electrode and the first electrode with a distance of less than or equal to 20 microns on the surface of the silicon dioxide layer by vacuum coating method The second ele...
PUM
Property | Measurement | Unit |
---|---|---|
particle diameter | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com