Load plate for batch testing of photoelectric detectors and load plate system
A photodetector, batch testing technology, applied in the direction of instruments, etc., can solve the problems of low measurement efficiency, unfavorable for statistical analysis of photodetectors, scattered test results, etc., and achieve the effect of rapid statistical analysis
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[0020] Please see attached figure 1 to the attached Image 6 . A carrier plate for batch testing of photodetectors, wherein an air circuit layer (100) and a chip fixing layer (200) are arranged in sequence from bottom to top, and the air circuit layer (100) and the chip fixing layer (200) are hermetically connected ; the air path layer (100) includes an air cavity (103) and an air suction hole (102), and the air cavity (103) is connected to the outside through the air suction hole (102); the chip fixing layer (200) includes M rows and N columns (the values of M and N are both greater than or equal to 1, in this embodiment, M and N are both equal to 3) regularly arranged chip slots (201), as well as signal terminal metal posts (205), power terminal metal A pile (206), an air hole (204), a signal terminal metal lead (207), a power terminal metal lead (208), a signal output contact slot (202) and a power input contact slot (203); the surface of the chip slot (201) The width ...
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