Multiple-light source scanning detection method
A technology of scanning detection and multi-light source, which is applied in the field of scanning detection, can solve the problems of repeated scanning, error between design moving speed and actual moving speed, etc., and achieve the effect of improving scanning speed, avoiding positioning error and good stability
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Embodiment 1
[0026] This embodiment provides a scanning detection method with multiple light sources, and the surface of the sample stage is distributed circularly.
[0027] There are two light sources, and the two light sources are arranged linearly and coincide with the radius of the sample stage.
[0028] The sample stage rotates around its center at a constant angular velocity.
[0029] While the sample stage rotates at the constant angular velocity, the sample stage translates at a constant linear velocity along the arrangement direction of the light sources.
[0030] In the embodiment of the present application, the movement is realized by means of uniform rotation of the sample stage and uniform translation in one direction, which avoids the time-consuming process of acceleration and deceleration of the sample stage, and avoids positioning errors caused by unstable speed changes of the sample stage during the scanning process. Effectively improve scanning speed and positioning accu...
Embodiment 2
[0032] like figure 1 As shown, this embodiment provides a multi-light source scanning detection method, which uses vacuum to adsorb the sample to the surface of the sample stage.
[0033] The surface of the sample stage is distributed in a circle, and the radius of the sample stage is R.
[0034] The light source is n point light sources, and the n point light sources are arranged in a straight line along a radius of the sample stage at an equidistance R / n, n is an integer greater than 2, and the illumination position of the light source is fixed. Wherein, the lowermost light source among the n point light sources is located at the lowermost edge of the sample stage.
[0035] The sample stage rotates around its center at a constant angular velocity.
[0036] While the sample stage rotates at the constant angular velocity, the sample stage translates at a constant linear velocity along the arrangement direction of the light sources.
[0037] When the rotation speed of the sa...
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