An active and passive integrated vibration reduction and isolation device suitable for large amplitude and wide frequency band

Abstract

The invention discloses an active-passive integrated vibration reduction and isolation device applicable to large amplitude and wide band. The active-passive integrated vibration reduction and isolation device applicable to large amplitude and wide band comprises a composite elastic displacement amplifying mechanism, and a piezoelectric ceramic driver, a vibration controller, a power amplifier and a sensor which are arranged in the composite elastic displacement amplifying mechanism. Damping layers are respectively arranged on four long sides of the composite elastic displacement amplifying mechanism; an intersection point of one group of two adjacent long sides of the composite elastic displacement amplifying mechanism is used as a rigid upper end part used for supporting and fixing a sample to be vibration-isolated; the sensor is arranged on the sample to be vibration-isolated; the sensor, the vibration controller, the power amplifier and the piezoelectric ceramic driver are sequentially and electrically connected. According to the active-passive integrated vibration reduction and isolation device applicable to large amplitude and wide band provided by the invention, the damping layers and the composite elastic displacement amplifying mechanism are matched with the active vibration isolation of the piezoelectric ceramic driver, so that the active-passive integrated vibration reduction of larger amplitude and wide band of precise instrument equipment is realized.

Description

technical field [0001] The invention belongs to the field of vibration control, in particular to an active and passive integrated vibration reduction and isolation device suitable for large amplitude and wide frequency band. Background technique [0002] From civil industry to national defense, many instruments and equipment (such as lithography machines, machine tools, instrumentation, aerospace systems, weapon systems, astronomical telescopes, building bridges, cultural relics, etc.) have increasingly stringent requirements on the vibration environment. Instruments and equipment are subjected to vibration isolation or vibration reduction treatment. In many application fields, there is an increasingly strong demand for micro-vibration control or suppression of precision instruments and equipment in academia and industry. [0003] The application fields of vibration reduction and vibration isolation are very broad, and the characteristics and methods of vibration isolation ...

AI Technical Summary

Problems solved by technology

However, the output displacement of the piezoelectric driver is very small, generally only tens of microns, and cannot be directly used in occasions with large vibration amplitudes.

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