Preparation method for quartz glass and quartz glass
A quartz glass, purpose technology, used in glass manufacturing equipment, glass forming, manufacturing tools, etc., can solve the problems of fast corrosion rate, corrosion, and inability to meet the requirements of semiconductor applications.
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preparation example Construction
[0056] like figure 1 Shown, a kind of preparation method of quartz glass that one embodiment of the present invention proposes, it comprises:
[0057] Step 10, using a dissolving agent to dissolve and mix the first doping compound and the second doping compound to form a doping mixed solution, the first doping compound is an aluminum-containing compound, and the second doping compound includes a Zr-containing compound, At least one of Y-containing compounds, La-containing compounds, Sc-containing compounds, Th-containing compounds, V-containing compounds, and Ti-containing compounds;
[0058] Wherein, the dissolving agent can be a kind of dissolving agent, which can dissolve the first doping compound and the second doping compound simultaneously; or, the dissolving agent can include two kinds of dissolving agents, one kind of dissolving agent is used to dissolve the first Doping compound, another dissolving agent is used to dissolve the second doping compound, forming a dopin...
Embodiment approach
[0099] 1. Vacuum electric melting process melting method:
[0100] Grinding the doping batch material, and screening the doping batch material after grinding, to obtain the doping batch material after screening, adopting a melting process for the doping batch material after screening, At 1000-2500 degrees Celsius, it is melted into the finished quartz glass, specifically:
[0101] Sieve the doped batch material after grinding to obtain the doped batch material with particles of 20-200 mesh, and melt the doped batch material with 20-200 mesh by vacuum electric melting process to form the finished quartz glass product.
[0102] 2. High-frequency plasma melting process Melting method:
[0103] Grinding the doping batch material, and screening the doping batch material after grinding, to obtain the doping batch material after screening, adopting a melting process for the doping batch material after screening, At 1000-2500 degrees Celsius, it is melted into the finished quartz gl...
Embodiment 2
[0119] A kind of quartz glass that one embodiment of the present invention proposes, comprises:
[0120] Quartz glass finished product, prepared by the preparation method of said quartz glass finished quartz glass;
[0121] The preparation method of described quartz glass comprises:
[0122]The first doping compound and the second doping compound are dissolved and mixed by a dissolving agent to form a doping mixed solution, the first doping compound is an aluminum-containing compound, and the second doping compound includes a Zr-containing compound and a Y-containing compound , at least one of La-containing compounds, Sc-containing compounds, Th-containing compounds, V-containing compounds, and Ti-containing compounds;
[0123] mixing a silicon-containing raw material with the doping mixture solution to obtain a doping mixture;
[0124] The doped mixture is fired into a finished quartz glass product through a firing process, wherein the finished quartz glass contains Al that...
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